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標題: 鋁、銅合金真空硬銲之研究
Study on vacuum brazing of Al and Cu alloys
作者: 葉獻文
Yeh, Hsien-Wen
關鍵字: Vacuum Brazing
出版社: 材料科學與工程學系所
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摘要: 本實驗採用真空硬銲製程來接合鋁合金與無氧銅兩種金屬材質,其應用於腔體、加熱器、冷卻板等光電與半導體製程設備。因為鋁、銅具熱傳導性佳、活性高之特性,若採用氬銲或CO 銲等 銲接方式難以獲得良好的接合效果。以雷射銲接或電子束銲接,雖可獲得品質較佳之銲道,卻有不易滲透、設備與維護成本昂貴等問題。利用真空硬銲製程來克服Al、Cu銲接時所產生的困難,藉由填料熔融產生原子擴散及毛細現象在不熔融母材的情況下結合同種或異種金屬,尤以異種材質的接合或形狀複雜難以接合的工件,皆可達到良好的接合效果。 由實驗結果得知;Al/Al、Cu/Cu與AlCu三組試片經真空硬銲製程,其抗拉強度皆可達100~125 MPa,約原材料1/3。使用Al/Cu合金填料會在擴散層析出硬、脆的介金屬化物,如Al2CuMg、AlCu與AlCuMg,過多的析出造成強度降低。加入退火製程,能有效的降低介金屬化合物的析出量。接合前施予適當的壓力(80~100 MPa),也可提升銲道的強度。此銲接製程的氣密性亦佳,氦氣測漏測得漏率可達3.6x10-11 Pa×m3/s。
This experiment study put an emphasis on welding aluminum alloy (A1 6061-T6) and oxygen free copper by vacuum brazing. The technique can be extensively applied to manufacture equipments of optoelectronics and semiconductor industries such as the chamber, susceptor, and cooling plate. Because aluminum and copper both possess high thermal conductivity and high activity, it is difficult to produce a fine joining between them by using TIG or CO2 welding. Although there's a way to gain better quality of weld metal by laser welding or electron-beam welding, some problems like the filtration and expensive maintain cost still exist. By the way of melting the filler will also bring the diffusion and the capillary attraction, and that the same or different kinds of metal can be welded well without melting the original material, especially the different ones and the complicated shapes. According to the experiment we can come to a conclusion that A1/A1, Cu/Cu, and AL/Cu once passed through the vacuum blazing, the ultimate tensile strength could reach 100-125 MPa. The diffuse layer will precipitate some hard and crispy inter-metallic compounds, for instance, Al2CuMg, AlCu and AlCuMg, but too much precipitation will decrease the strength. If we plus annealing during vacuum brazing, the amount of precipitation will be reduced effectively. Giving appropriate pressure before the welding process can increase the strength of the weld metal. This kind of welding manufacturing has fine pressurization, the leaking test can also reach 3.6x10-11 Pa×m3/s.
其他識別: U0005-1707200611380300
Appears in Collections:材料科學與工程學系



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