Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/10224
標題: 氮化薄閘極氧化層之可靠度劣化研究
Reliability Deterioration of Nitrided Gate Oxide Thin Films
作者: 王永銘
Wang, Yung-Ming
關鍵字: Nitrided oxide
氮化閘極氧化層
Reliability
Boron penetrate
可靠度
硼穿透
出版社: 材料科學與工程學系所
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摘要: 在深次微米製程中,因短通道效應日益嚴重,多已將埋入通道PMOS之多晶矽閘極改為表面通道P+多晶矽閘極。表面通道的好處是載子經基材表面傳導,容易受閘極電壓的控制,因此表面通道要比埋入通道好控制許多。但PMOS閘極多晶矽需使用硼作為摻雜物,易產生硼會穿過氧化層/矽介面,進入基材而產生臨界電壓偏移現象。 目前製程上對於此問題所使用之解決方式,其中一個就是在形成閘極氧化層後採用氮化製程,來抑制P+ Poly內的摻雜硼原子對閘極氧化層的穿透與擴散至基底。然而使用傳統高温氮化法,因受限氮化濃度無法提升,以及先進製程對熱預算(thermal budget)的控制,早已無法滿足次世代製程技術要求。但電漿氮化製程卻擁有低溫,高氮化濃度以及高生產力等優點,使其成為次微米製程的主流。縱使有以上這些優點,氮濃度依然不能無限增加,因氮原子仍有機會擴散到SiO2/Si介面,導致元件特性退化以及衍生的元件可靠度壽命問題。 本論文由氧化層氮濃度分割實驗可得知,提高氮濃度有助於抑制P+閘極多晶矽內的摻雜硼原子穿透至基材且使等效氧化層厚度減少。但是當氮濃度由12.2%改變至14.3%時,閘極電流密度卻會大幅增加約30%且TDDB與NBTI壽命也會衰退約70-90%。此外,由TDDB測試結果指出PMOS壽命比NMOS短,直到當氮濃度到達14.3%時,二者壽命才會較為相近。而這表示NMOS單純只受到氮濃度影響,而PMOS則受到氮原子濃度及硼穿透效應雙重影響。藉由本實驗之結論,可得知氮濃度與可靠度壽命之關係,進而估算在產品10年保固的要求下,SPA(Slot plane Antenna)電漿氮化技術之氧化層氮化濃度之極限。
For deep submicron meter process,short channel effect becomes worse and so PMOS device has been changed to surface channel from buried channel by P+ gate poly use. However,P+ gate poly needs to dope by Boron, but device threshold voltage happen shift issue due to Boron penetrate through Si/SiO2 to substrate easily .On the other hand,if devices reduce Boron dosage to prevent penetration problem,P+ poly may impact depletion issue and then induce performance deterioration. About solution of advanced process for this issue,nitrided gate oxide usually be used to block boron penetration. However,traditional thermal nitridation processes are limited to low nitrogen concentration in oxide and advanced processes restrict thermal budget. Plasma nitridation technologies haven’t above shortage,it provide low process temperature、high nitrogen concentration and high throughput…etc. But Nitrogen is unable to increase infinitely because nitrogen may diffuse to Si/SiO2 interface and induce device deterioration and subsequent reliability problems. By nitrogen concentrations split experiment in thesis,increase of nitrogen concentration is good for blocking boron penetration and also improves reduction of equivalent oxide thickness (EOT). But it would raise gate leak current around 30%,and also lower TDDB and NBTI lifetime around 70-90%. Besides,TDDB results show NMOS lifetime is longer than PMOS lifetime. Until nitrogen concentration reach 14.3%,NMOS and PMOS lifetime will occur smaller gap. The hints are able to explain that NMOS lifetime is affected by nitrogen concentration but PMOS is affected by nitrogen concentration and Boron penetration. By relationship between reliability lifetime and nitrogen concentration,SPA(slot plane antenna) plasma nitridation technology can be estimated limitation of nitrided-oxide for 10 years product warranty.
URI: http://hdl.handle.net/11455/10224
其他識別: U0005-1907200618132200
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-1907200618132200
Appears in Collections:材料科學與工程學系

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