Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/10236
標題: 利用塗佈參數最佳化來增加光阻利用率
Improved photo-resist utilization by optimization of coating variables
作者: 張志榮
Chang, Chih-Jung
關鍵字: coating
塗佈
design of experiments
color filter
田口實驗計畫
彩色濾光片
出版社: 材料科學與工程學系所
引用: 1.徐文月,“塗佈產業市場概況”, 工業材料雜誌,第二百三十五期,83-97(2006)。 2.Cohen, E. D. ,Gutoff, E. B. “Modern Coating and Drying Technology”,John Wiley & Sons,Inc,1992. 3.葉玉瓊,游在安,“平面液晶顯示器用大面積精密塗佈技術”, 工業材料,第一百四拾期,136-143(1998) 4.游在安,潘金平,“大面積基板精密塗佈技術(上)”,工業材料,第一百二拾期,132-135(1996) 。 5.游在安,潘金平,“大面積基板精密塗佈技術(下)”,工業材料,第一百二拾一期,99-105(1997) 。 6.George L. Booth,”Coatin equipment and processes”,Lockwood publicshing Co., Inc.,1970. 7.D. Satas and Arthur A. Tracton, Coating Technology Handbook, Marcel Dekker, Inc., New York, USA. ,2001. 8.Cohen, E. D. ,Gutoff, E. B. “Coating and Drying Defects”, Wiley-Interscience, 2006. 9.張永漢,“精密塗佈技術在平面顯示器光學膜之應用簡介”,工業材料雜誌,第二百一十一卷期,127-136(2004)。 10.張憲民,張益榮,劉大佼,“狹縫式模具之高速塗佈”,塑膠資訊,第一百零九卷,2-7(2005)。 11.陳憲得,劉大佼,“狹縫式塗佈技術之發展”,塑膠資訊,第三十九卷,19-31(2000)。 12.溫恕恆,朱文彬,吳平耀,“精密塗佈技術介紹”,化工商情,第五十卷,11-23(2001)。 13.吳平耀,“大面積基板塗佈製程解析”,電子與材料雜誌,第十六期,68-72(2005)。 14.劉家錚,“片狀基板塗佈機之技術與應用”,工業材料雜誌,第一百零六期,106-113(2006)。 15.K. Y. Lee and T. J. Liu, Minimum web thickness in extrusion slot coating, Chemical Engineering Science. 47, 1703-1713, 1992. 16.O. J. Romero, L.E. Scriven and M. S. Carvalho, Slot coating of mildly viscoelastic liquids, Journal of Non-Newtonian Fluid Mechanics. 138, 63-75, 2006. 17.Michael Kouris,”Pulp and Paper Manufacture,Volume 8 Coating,Converting,and Specialty Processes”,Joint Textbook Committee of the Paper Industry, 74-108,1983. 18.Haaland, P., MacKibben, J., & Parodi, M. (1995). The art and science of thin film coating: a progress report. Solid State Technology, 38, 83-85 19.Milbourn, T.M., & Barth, J.J. (1994). Method of applying discrete coating patches on a moving web. U.S. Patent No. 5,360,629. 20.Stroszynski, J. (1977). Apparatus for the manufacture of a series of photoconductor webs. U.S. Patent No. 4,050,410. 21.Choinski, E.J. (1990). Method and apparatus for patch-coating printed circuit boards. U.S. Patent No. 4,938,994. 22.楊之光,“ 先進狹縫式塗佈研究”,國立清華大學博士論文,2001。 23.Edgar B. Gutoff, Edward D. Cohen and Gerald I. Kheboian, Coating and drying defects, Wiley-Interscience, New York, USA. 1995. 24.鍾清章,“田口式品質工程導論”,中華民國品質學會,1989。 25.張忠樸,“實驗計畫速學活用法”,電路板資訊雜誌,2005。
摘要: 在彩色濾光片 (Color Filter) 的塗佈製程中,光阻的費用所佔的比例為所有耗材中第二名。因在實際生產中因考慮到成本無法使用大量條件來做測試,故利用田口實驗法來得到最佳化的參數。本實驗則分為兩階段實驗,第一階段是針對塗佈製程中噴嘴移動加速度、幫浦移動加速度、與噴嘴及幫浦之間移動時間差與塗佈液珠成形的量,四大因子利用田口實驗計畫的方法將塗佈參數最佳化以得到製程最佳參數,再接著縮短塗佈之距離,以達到縮簡製程光阻之用量同時也能增加產品尺寸設計對玻璃的利用率。第二階段則探討噴嘴移動加速度與噴嘴及幫浦之間移動時間差兩大因子,得知此光阻之塗佈下限區域及當噴嘴移動加速度與幫浦的移動速度相等時可以減少變異之因子而快速得到膜厚的參數。
Abstract In the coating process of color filter, consumption of photo-resist material ranks 2nd in manufacturing cost among all the consumption materials. The large testing cost involved in experiment by use of in-plant facilities limits number of the experiment that can be performed. Our purpose is to use Taguchi experimental design to optimize coating variables. The experiment is divided into two stages. The 1st stage uses Taguchi experimental design to examine four variables including nozzle movement acceleration, pump movement acceleration, the time gap between nozzle movement, pump movement, and coating bead amount. Experimental results show that utilization of the photo-resist is optimized by a proper control of coating variables, resulting in a reduced “coating distance” on glass. In the 2nd stage of experiment, acceleration of nozzle movement and the time gap between nozzle movement and pump movement have been further examined. Uniform thickness of photo- resist can be quickly obtained when the acceleration of nozzle movement and the gap between nozzle movement and pump acceleration are of equivalent speed.
URI: http://hdl.handle.net/11455/10236
其他識別: U0005-2006200609312000
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2006200609312000
Appears in Collections:材料科學與工程學系

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