Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/10363
標題: FePt-(B-Ag)顆粒薄膜之磁性與微結構研究
Magnetic Properties and Microstructure of FePt(B-Ag) Granular Films
作者: 黃健強
Huang, Jian-Chiang
關鍵字: FePt
鐵白金
Ag
B
Granular films


顆粒薄膜
出版社: 材料科學與工程學系所
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摘要: Multilayers Ag/[B(t)/FePt(1nm)]10 (thickness t = 0.05-0.6 nm) were alternately deposited on a glass substrate and subsequently annealed by rapid thermal process (RTP) at 800 oC for 3 min. After RTP, the interface between FePt and B inter-diffusion to form granular films. The (FePt)100-XBX granular films when B content added 5%,10% showed perpendicular magnetization. Compared to Ag/FePt bilayer, the average grain size of the L10 FePt decreased from 22.2 nm to 20.1,15.1nm and uniformly separated when the B content added 5%、10%. Then selected (FePt)90B10 and (FePt)95B5 granular films codeposited with different fraction of Ag, the BXAg1-X proportion from X=0 to X=1 .After RTP, formed the (FePt)90(BXAg1-X)10 and (FePt)95(BXAg1-X)5 granular films. Compared with (FePt)100-XBX granular films, the average grain sizes of (FePt)90(B0.7Ag0.3)10 and (FePt)95(B0.9Ag0.11)5 decreased to 10.8nm,6.6nm. All granular films showed perpendicular magnetization. Finally, selected (FePt)90B10 granular films codeposited with different fraction of Fe, the BXFe1-X proportion from X=0 to X=1.After RTP, formed the (FePt)90(BXFe1-X)10 granular films. From microstructure, the fraction of Fe increased , the granular films were changed to interaction-grains-structure. The hard-soft magnetic FePt-FeB grains are interacted and formed the aggregated FePt-FeB grains.
本實驗利用直流磁控濺鍍系統,以交錯沉積的方式在玻璃基板上製備出膜層結構為Ag(1.1nm)/[ B(t nm)/ FePt(0.95nm)]10(t = 0.05 – 0.6 nm)之多層膜,接著利用快速升溫製程(RTP)進行退火。經過熱處理後,FePt與B間會因互相擴散而形成(FePt)100-XBX之顆粒薄膜;在磁性質上B添加X=5、10時,具較優之垂直磁化強度。以及在微結構當B添加X=5、X=10時,相較於FePt/Ag雙層膜,FePt晶粒尺寸有明顯下降,由22nm下降至20nm、15nm,且分隔較好,顆粒較為均一。 接者選擇(FePt)100-XBX (X=5、10)之薄膜,分別為(FePt)90B10以及(FePt)95B5顆粒薄膜利用B與Ag共鍍,其BXAg1-X比例改變為(X=1-0)。經過熱處理後,形成(FePt)90(BXAg1-X)10以及(FePt)95(BXAg1-X)5顆粒薄膜。其中 (FePt)90(B0.7Ag0.3)10及(FePt)95(B0.9Ag0.1)5顆粒薄膜,相較於(FePt)100-XBX顆粒薄膜之FePt晶粒尺寸有明顯縮小至10.8nm、6.6nm,在磁性質上仍表現出垂直磁化特性。 最後再選擇(FePt)100-XBX (X=10)之薄膜,為(FePt)90B10顆粒薄膜利用B與Fe共鍍其BXFe1-X比例改變為(X=1-0),經過熱處理後,形成(FePt)90(BXFe1-X)10顆粒薄膜。從微結構上當Fe的比例增加,相較於(FePt)90B10顆粒薄膜其FePt硬磁晶粒開始有與FeB軟磁晶粒團聚之現象。
URI: http://hdl.handle.net/11455/10363
其他識別: U0005-2706201214093600
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2706201214093600
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