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標題: 藉以熱化學氣相沉積法於固定乙炔/氬氣比例下製備碳密封鍍層光纖:不同沉積溫度的影響
Effect of different deposition temperatures on the hermetically carbon-coated optical fiber prepared by thermal chemical vapor deposition method at afixed acetylene/argon ratio
作者: 王孟坤
Wang, Meng-Kun
關鍵字: TCVD
出版社: 材料科學與工程學系所
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摘要: This study investigates the effect of different deposition temperatures on the hermetically carbon-coated optical fiber prepared by thermal chemical vapor deposition method at a fixed acetylene/argon ratio. The surface morphology, microstructure, coating thickness, surface property, and electrical property of carbon coatings were investigated by optical microscopy, X-ray diffraction spectrometer, Raman scattering spectrometer, field emission scanning electron microscopy, atomic force microscopy, contact angle meter, four point probe method, and nanoindenter. The results indicate that the deposition rate, surface roughness, and electrical resistivity of the carbon coatings increase as the deposition temperature increases, while the degree of ordering, the in-plane crystallite size (La), mean crystallite size (Lc), water-repellency and mechanical properties of the carbon coating decrease. Additionally, based on the low-temperature surface morphology of the carbon coatings, it is found that the carbon film deposited at temperatures below 750℃ with the thickness exceeding 68nm can be used as the hermetic optical fiber coating.
其他識別: U0005-2707200702090200
Appears in Collections:材料科學與工程學系



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