Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/10954
標題: 離子束轟擊對鎳鐵/氧化鐵雙層膜之結構與磁性質影響
The influence of ion-beam bombardment on structures and magnetic properties of NiFe/Fe-Oxide bilayers
作者: 呂昭德
Chao-Te-Lu
關鍵字: exchange field
交換偏壓場
exchange coupling
coercive field
交換耦合
矯頑磁力
出版社: 材料科學與工程學系所
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摘要: 本研究利用雙離子束濺鍍系統製備鎳鐵(厚度10nm)、氧化鐵(厚度26nm)雙層薄膜。利用雙離子束濺鍍系統,Kaufman 型離子源轟擊鐵靶材同時,藉由於 End-Hall 離子源通入氧氣、氬氣, 41%(O2/Ar+O2)之混合氣體,與鐵原子產生反應成氧化鐵薄膜,接著再以輔助離子源(End-Hall)以0~150V不同能量轟擊氧化鐵薄膜,轟擊完再鍍上鎳鐵金屬薄膜,並探討經轟擊過後鎳鐵/氧化鐵雙層薄膜的結構及磁性質。 XRD研究結果顯示上層鎳鐵薄膜為具有面心立方結構之鎳鐵相(a=3.53 Å),但試片看不出明顯的α- Fe2O3之繞射峰,可能因為α- Fe2O3層厚度太薄所致。 穿透式電子顯微鏡分析α-Fe2O3單層薄膜為多晶結構,氧化鐵薄膜為剛玉型六型充填構造,氧化鐵單層薄膜之晶粒大小為8~23nm。 磁性分析顯示,鎳鐵/氧化鐵雙層薄膜在5K(20 kOe場冷)溫度下所測得的磁滯曲線有明顯的偏移的現象,並且有增大的矯頑磁力。離子束能量為70V其具有最大的矯頑磁力(Hc~155 Oe)。離子束轟擊能量為150V其具有最大的交換偏壓場(Hex~324 Oe) 。 離子束能量為130V其具有最小的交換偏壓場(Hex~132 Oe) 以及矯頑磁力(Hc~62Oe)。此行為可歸因於離子束轟擊使α-Fe2O3表面磁矩重新排列所造成的現象。 表面粗糙度分析(AFM),α- Fe2O3單層薄膜於不同離子束能量(0~150V)轟擊表面粗糙度為(Rms~0.2nm)並無明顯變化,並且觀察NiFe/ Fe2O3 (0~150V)雙層薄膜(0V、70V) 粗糙度為(Rms~0.6nm)也無明顯變化。 磁電阻性質顯示出NiFe/ Fe2O3雙層薄膜具有異相性磁阻的行為。在77K時總磁阻變化較室溫時來的大,這是由於聲子散射降低的緣故,在77K時離子束轟擊能量為100V具有最大總磁阻變化 (0.3Ω)。離子束轟擊能量為150V具有最小總磁阻變化 (0.1Ω)。
In this study, the structural and magnetic properties of NiFe(thickness:10 nm)/Fe-Oxide (thickness: 26 nm) bilayer were investigated. Composition of Fe-Oxide varied with the gas flow ratio during dual ion beams assisted deposition. α - Fe2O3 was formed when the O2/(Ar+O2) ratio was 41%. We have fixed this gas flow ratio for the entire sample preparations. Transmission electron microscopy and X-ray results showed that the top NiFe layer is F.C.C. structure (a~ 3.53 Å). The bottom Fe-Oxide layer wasα - Fe2O3. NiFe / α - Fe2O3 bilayer are both polycrystalline, the grain sizes range from 8 nm to 23 nm. Before NiFe alloy was deposited, we bombarded α - Fe2O3 surface with End-Hall Ar-ion source (ion beam energy, VEH, 0~150V) to study the impacts on its Magneto-Trasport properties. Magneto-Trasport properties of NiFe/Fe2O3 bilayer were measured at temperature of 5K. NiFe/ Fe2O3(150V) exhibited the largest exchange bias field (Hex~ 324 Oe). NiFe/Fe2O3 (130 eV) showed the smallest exchange bias field (Hex~132 Oe) and the smallest hysteresis (Hc~62 Oe). The NiFe/Fe2O3 (70V) demonstrated the largest Hc (Hc~155 Oe). We believed the differences were resulted from spin reorientation of α - Fe2O3 after Ar-ion bombardment. AFM Surface analysis indicated that roughness of α- Fe2O3 surfaces(Rms~0.2nm) and NiFe/Fe2O3 surfaces(Rms~0.6nm) did not change with different End-Hall Ar-ion bombarded energies. The magnetotransport studies have shown that these NiFe/(Ni,Fe)O bilayers exhibit the anisotropic magnetoresistance (AMR) behavior. . The NiFe/Fe2O3 at 77 K (100V) demonstrated the largest MR variation (0.3Ω)..The NiFe/Fe2O3 (150V) demonstrated the smallest MR variation (0.1Ω).
URI: http://hdl.handle.net/11455/10954
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