Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/11303
標題: TeO2/SnO2多階層異質結構之合成及其室溫紫外光輔助氣體感測特性
Synthesis of TeO2/SnO2 hierarchical nanostructure and their UV-enhanced room temperature gas sensing properties
作者: 黃品富
Huang, Ping-Fu
關鍵字: 金屬半導體氧化物
Metal oxide semiconductor
多階層奈米異質結構
紫外光輔助
氣體感測
hierarchical nanostructures
UV-enhanced
gas sensing
出版社: 材料科學與工程學系所
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摘要: 本實驗透過兩階段氣相傳輸法成功合成出TeO2/SnO2樹枝狀奈米異質結構,並以適當的溫度退火熱處理得到TeO2/SnO2串珠狀奈米異質結構。我們也藉由分段實驗觀察在不同製程溫度下TeO2分枝奈米結構於SnO2主幹奈米結構的形貌演化過程,探討TeO2/SnO2樹枝狀奈米異質結構的成長機制。結果顯示,當加熱到310℃時,TeO2薄膜會先完全包覆SnO2主幹奈米結構,之後藉由Au觸媒VLS及TeO2自催化VS的機制在垂直於SnO2主幹奈米結構的方向成長出TeO2分枝奈米結構,形成TeO2/SnO2樹枝狀奈米異質結構。將TeO2/SnO2樹枝狀奈米異質結構加熱到400℃持溫20分鐘,原本完全包覆SnO2主幹的TeO2分枝會經由汽化或團聚變成TeO2/SnO2串珠狀奈米異質結構。氣體感測特性方面,我們將SnO2奈米線、TeO2/SnO2樹枝狀奈米異質結構及TeO2/SnO2串珠狀奈米異質結構製成氣體感測元件,以UV光輔助量測它們在室溫下對不同濃度的CO與NO2的感測特性。量測結果顯示,TeO2/SnO2樹枝狀奈米異質結構由於有較大比表面積以及TeO2分枝奈米結構上的懸浮鍵的作用,表現出比單純SnO2奈米線更高的敏感度;而TeO2/SnO2串珠狀奈米異質結構由於額外在SnO2主幹奈米結構與TeO2串珠奈米結構間有大量的p-n接面,又比TeO2/SnO2樹枝狀奈米異質結構表現出最佳的靈敏度。
In this study, we successfully synthesized TeO2/SnO2 branch-like hierarchical nanostructures by a two step vapor transport method, and then obtained TeO2/SnO2 bead-like hierarchical nanostructures by a suitable heat treatment. The growth mechanism of TeO2/SnO2 branch-like hierarchical nanostructures was investigated by observing the structure evolution during the synthesis process. By using XRD, TEM and SEM analysis, it can be observed that TeO2 films will first cover the SnO2 backbone nanowires when the synthesis temperature was reached 310℃, and the TeO2 branch nanowires will subsequently grow out of the SnO2 backbones in perpendicular directions by both Au catalyst vapor-liquid-solid (VLS) and self-catalytic vapor–solid (VS) growth mechanism. For the gas sensing properties, gas sensors based on the SnO2 nanowires, TeO2/SnO2 branch-like and TeO2/SnO2 bead-like hierarchical nanostructures are fabricated and their UV-enhanced gas sensing properties to CO and NO2 gases with different concentrations were measured. The experimental results showed that the TeO2/SnO2 branch-like hierarchical nanostructures showed a better gas sensing performance than the SnO2 nanowires, which can be attributed to their higher surface-to-volume ratio and the dangling bonds associated with the TeO2 branched nanowires. Compared with the TeO2/SnO2 branch-like hierarchical nanostructures, the TeO2/SnO2 bead-like hierarchical nanostructures exhibited even better sensitivities to CO and NO2 gases due to the additional formation of p-n junctions between the SnO2 backbone nanowires and the TeO2 beads.
URI: http://hdl.handle.net/11455/11303
其他識別: U0005-1607201216384500
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-1607201216384500
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