Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/11366
標題: 可撓式氧化鋅奈米發電機之製作與呼吸致電特性研究
Fabrication and Characterization of a Flexible ZnO Nanogenerator for Harvesting Energy from Respiration
作者: 林宏易
Lin, Hung-I
關鍵字: 氧化鋅
Zinc oxide
奈米線
奈米發電機
呼吸
壓電
nanowires
nanogenerator
respiration
piezoelectric
出版社: 材料科學與工程學系所
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摘要: 藉由呼吸的微小能量即可驅動奈米發電機達到取代電池行自行發電目的,是具有前瞻性的科技。氧化鋅具有獨特的壓電特性的半導體材料,近幾年來已被廣泛的探討。本文研究新穎性的氧化鋅奈米發電機具有撓曲性及高度輕量化基板可用於呼吸發電,使用剝離基板技術可將氧化鋅奈米線從矽基板轉移到透明可撓曲的環氧樹酯基板。在呼吸過程中,具有壓電特性的氧化鋅奈米發電機會產生交流電荷。正常人類呼吸的流速大約小於 2.0 ms-1及潮氣容積 500 mL,在此條件下,氧化鋅奈米發電機可產生電流密度3.65 nA 及電壓 27.32 mV。而在呼吸的流速5.0 ms-1及潮氣容積 1000 mL的條件下,氧化鋅奈米發電機可產生電流密度11.21 nA 及電壓 67.25 mV。 為了達到更高的發電能量,本研究引進了疊層法及使用聚二甲基矽氧烷的材料做為可撓曲基板。兩層的氧化鋅奈米發電機約25 μm厚,而16層的大小約200 μm。6層的氧化鋅奈米發電機發電量0.5 μA cm-2 及電壓 0.6 V,而在在呼吸的流速5.0 ms-1的條件下可產生0.8 μA 及1.3 V。因此剝離法及疊層法是很具有前瞻的製程方法來製備可被呼吸擺動的奈米發電機。
Replacing batteries by harvesting energy from human respiration is a promising technology for self-powered systems using the concept of nanogenerators (NGs). ZnO is a semiconductor material with unique piezoelectric property has been discussed recently. A novel ZnO nanogenerator with a flexible and highly lightweight substrate has the potential of harvesting energy from human respiration. We introduce a lifting-off method of ZnO nanowires from Si substrate and embedded in flexible films-epoxy resin has been proposed. Flexible films served as the secondary and flexible substrate after ZnO nanowires transferring from the Si substrate. The piezoelectric potential of a ZnO nanogenerator can produce AC power output during respiration. For normal human respiration at an air flow rate of 2.0 ms-1 and tidal volume 500 mL, the ZnO nanogenerator generates current-density and voltages of 3.65 nA and 27.32 mV, respectively. The electrical performance reached the highest value of 11.21 nA and 67.25 mV at an air flow rate of 5.0 ms-1 and tidal volume 1000 mL. To obtain the high-output piezoelectric performance, fold-up fabrication method is introduced and polydimethylsiloxane (PDMS) is used as the flexible film. The thickness of the 2-fold ZnO NG was approximately 25 μm, and the 16-fold ZnO NG had a comparatively low size of approximately 200 μm. The 16-fold ZnO NG generates approximately 0.6 V and 0.5 μA at the air flow rate of 2.0 ms-1, while generating approximately 1.3 V and 0.8 μA at the air flow rate of 5.0 ms-1. The lift-off and fold-up methods are both candidates for creating devices that can harvest energy from human respiration.
URI: http://hdl.handle.net/11455/11366
其他識別: U0005-0506201313461400
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-0506201313461400
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