Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/11404
標題: 氧化銦錫(ITO)成膜於不同基材上之特性與 熱處理改質之研究
The study of property and changing thermal process of ITO deposited on different substrate
作者: 劉美怡
Liu, mei-yi
關鍵字: 銦錫氧化物(ITO)
indium tin oxide
觸控式面板
(Touch Panneal)
直流磁控濺鍍(DC magnetron sputtering)
射頻磁控濺鍍(RF magnetron sputtering)
玻璃基材(Glass)
光阻(Transparent Photo Resist)
可撓性塑膠基材PET (Polyethylene terephtalate)
面電阻(resistance)
Touch Panneal
DC magnetron sputtering
RF magnetron sputtering
Glass
Transparent Photo Resist(OG)
Polyethylene terephtalate
resistance
出版社: 材料科學與工程學系所
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摘要: 本文以90wt% In和10wt% Sn銦錫合金為靶材,使用直流及射頻磁控濺鍍(DC&RF sputter),製備單層ITO (Indium tin oxide)透明導電薄膜沉積於玻璃基材(Glass)、光阻(Transparent Photo Resist)、可撓性塑膠基材PET (Polyethylene terephtalate)上,並比較經由熱處理前後差異,分析其對於薄膜的阻值、導電性、穿透率及微觀組織等薄膜特性。 薄膜性質分析檢測上,係利用四點探針(Four point probe)來量測薄膜的導電性,以及使用紫外光可見光分光光譜儀(Cary 300 UV-Visible Spectrophotometer)來量測薄膜的光穿透率,場發射掃描式電子顯微鏡(FE-SEM) 分析表面形貌,XRD繞射儀進行薄膜的微觀組織分析。 實驗結果顯示: 1.三種基材(Glass、OG、PET)鍍上單層ITO薄膜退火後面阻抗值(Rs)以玻璃基板最佳(80ohm / square),OG次之(87ohm / square) , PET第三(157ohm / square)。 2.三種基材(Glass、OG、PET)鍍上單層ITO薄膜退火後穿透率T% 以玻璃基板最佳(91%)。 3.由SEM圖觀察可看出ITO薄膜經過退火前膜質蓬鬆,退火後晶格重新排列呈現較緻密現象,可得結晶性較良好之薄膜。 4.由XRD圖可看出經熱處理後的ITO 膜(222)繞射峰強度增強且ITO薄膜結晶性較佳。其晶格常數(lattice constant) a=10.118A。 本研究結果顯示製備單層ITO (Indium tin oxide)透明導電薄膜沉積於玻璃基材(Glass)、光阻(Transparent Photo Resist)、可撓性塑膠基材PET (Polyethylene terephtalate)上經過熱處理ITO片電阻、光學可達到達商業用途(觸控面板)的要求。
This reported that using 90wt% In and 10wt% Sn indium tin alloy as target, applying DC & RF sputter to prepare the transparent conductive films of single-layer ITO (Indium tin oxide) deposited on substrates of glass, transparent photo resist, or flexible plastic substrate PET (polyethylene terephtalate). The difference is compared between before and after heat treatment, and the film characteristics of resistance, conductivity, transmittance, and micro-structure is analyzed.. For the properties of the films detection, four-point probe is used to measure the conductivity of the films, and Cary 300 (UV-Visible Spectrophotometer) is used to measure the optical transmittance of the films, field emission scanning electron microscope (FE-SEM) is used to analyze surface morphology, and XRD diffraction is used to analyze micro-structure of the film. The result shows: 1.Comparing surface resistance (Rs) after annealing of three base materials (Glass, OG, PET) coated with single-layer ITO, glass substrates (80ohm / square) is the best, OG (87ohm / square) followed , PET (157 ohm / square) the third. 2.Comparing transmittance (T%) after annealing of three base materials (Glass, OG, PET) coated with single-layer ITO, glass substrates (91%) is the best, 3.Observing SEM image, membranous of ITO film is fluffy before annealing, and rearranged lattice is denser after annealing 4.From XRD image, ITO films (222) after heat treatment has more intense diffraction peak and better ITO thin film crystalline. The result shows that the transparent conductive films of single-layer ITO (Indium tin oxide) deposited on substrates of glass, transparent photo resist, or flexible plastic substrate PET (polyethylene terephtalate). With heat-treatment, its ITO area resistance 、optical transmittance is reached the requirement the commercial use (touch panel).
URI: http://hdl.handle.net/11455/11404
其他識別: U0005-2806201215190600
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2806201215190600
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