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A Study on Long-Range Single-Axis Nanometer Positioning System
Wijaya, Martinus Tony
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|摘要:||本研究主要目的是要改善單軸定位系統之機構設計以及控制，使此定位平台具有行程100 mm之要求。定位平台是由線性滑軌、進給機構及三根堆疊式壓電致動器所組合而成。精密定位系統主要是利用壓電致動器驅動進給機構，使它產生週期性的圓周運動並利用摩擦方式來撥動滑軌之表面。藉由此連續進給的方式來達成長行程精密定位之目標。另外，研究中利用Current Reality Tree理論方法來針對楊所設計之進給機構之核心問題，產生一個新的設計概念，以解決現存問題。
本研究利用TMS320F240 DSP單晶片控制面版配合控制法則來控制定位平台。從實驗結果可得，定位平台的行程可以超過90 mm，平台的最高速度為 5.8 mm/s，而平均速度為 1 mm/s。定位的穩態誤差峰對峰值小於20 nm；偏差量小於0.5 nm，以及振動幅度(1σ)小於7 nm。|
This study is focusing on the improvement design and control of a long-range single-axis positioning system, which has a travel range of 100 mm. The positioning system was constructed by a linear guide, a feeding mechanism and three stacked piezoelectric actuators. The stacked piezoelectric actuators were used to drive the feeding mechanism with a circular movement, which will feed the linear guide by friction force. Through continuous feeding, an unlimited travel range positioning system can be achieved. A Current Reality Tree design methodology was used to create a new conceptual design and to solve the core problems embedded in the feeding mechanism system proposed by Yang . For control system, two-stage control strategy was introduced for the positioning control, i.e. coarse motion control and fine motion control. At coarse motion stage, impact-drive motion combined with fuzzy control was used to accelerate the linear guide to approach the target position. At fine motion stage, stick-drive motion combined with classical feedback-feedforward control can provide a nanometer positioning accuracy. The control algorithm was implemented on TMS320F240 DSP-based control board, and the experiment results show that the proposed feeding mechanism system with two-stage control strategy can achieve a travel range more than 90 mm with maximum velocity of 5.8 mm/s, average velocity 1 mm/s, steady state error is less than 20 nm, positioning bias is less than 0.5 nm and standard deviation is less than 7 nm.
|Appears in Collections:||機械工程學系所|
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