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標題: TiO2/SnO2薄膜應用於臭氧濃度感測
The application of TiO2/SnO2 thin film to the ozone detection
作者: Pai, Tsung-Yuan
關鍵字: TiO2
Ozone detection
出版社: 物理學系所
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摘要: 本實驗以二氧化錫(SnO2)及二氧化錫(SnO2)/二氧化鈦(TiO2)接合薄膜分別檢測其對臭氧之感測特性。利用磁控濺鍍系統做為薄膜沉積的方法,以99.99%的二氧化鈦及二氧化錫為靶材,固定工作壓力為5×10-2 mbar,工作氣體為氬氧混合氣,O2/Ar比例為3/7,基板溫度為400℃,分別沉積SnO2/Substrate、SnO2/TiO2/Substrate及TiO2/SnO2/Substrate三種疊合方式,並比較其對臭氧濃度的感測性質,發現以SnO2/TiO2/Substrate的接合方式靈敏度較高。 在過去研究中,以半導體為材料的臭氧感測器將電極製作於材料下方,本實驗亦嘗試將電極製作於薄膜表面與過去的方式做比較,發現將電極製作於薄膜上方將有較佳的靈敏度。
其他識別: U0005-2308201005295000
Appears in Collections:物理學系所



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