Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/17247
標題: 利用濺鍍系統在雙晶基板上製作高溫超導量子干涉元件之特性
Fabrication and properties of HTS-SQUID on Bicrystal substrate by RF sputter system
作者: 黃柏維
Huang, Po-Wei
關鍵字: 雙晶基板
bicrystal substrate
濺鍍
發光二極體光源
釔鋇銅氧
RF sputter
LED
YBCO
出版社: 物理學系所
引用: [1] H. Kamerlingh Onnes, Leiden Comm. 120b, 122b, 124c (1911) [2] W. Meissner and R. Ochsenfeld, Naturwissenschaften 21,787 (1933) [3] J. Bardeen, L. N. Cooper, and J. R. Schrieffer, Phys. Rev. 106, 162 (1957); 108, 1175 (1957) [4] B. D Josephson, Phys. Lett. 1,251 (1962) [5] M. K. Wu, J. R. Ashburn, C. J. Torng, P. H. Hor, R. L. Meng, L. Gao, Z. J. Haang, Y. Q. Wang and C, W, Chu, phys. Rev. Lett. 58, 908 (1987) [6] M. Tinkham, “Introduction to superconductivity“Second editionWiley (2005) [7] K. K. Likharev; Rev. Mod. Phys. 51, 101 (1979) [8] R. C. Jaklevic, J. Lambe, A. H. Silver, and J. E. Mercereau, Phys. Rev. Lett. 12. 159 (1964) [9] R. C. Jaklevic, J. Lambe, A. H. Silver, and J. E. Mercereau, “Quantum interference effects in Josephson tunneling,” Phys. Rev. Lett., vol. 12, pp. 159–160, Feb. (1964) [10]A. H. Silver and J. E. Zimmerman, Phys. Rev. Lett. 15, 888 (1965) [11] F. London and H. London; Proc. Roy. Soc. A149, 71 (1935) [12] Tesche and J. Clarke, Low Temp.Phys. 29, 301 (1977) [13] D. Koelle, R. Kleiner, F. Ludwig, E. Dantsker and John Clarke, Reviews of Modern Physics 71, 613 (1999) [14] 楊鴻昌,<約瑟芬效應簡介>,《物理雙月刊》5, 189(1983) [15] John Clarke and Alex I. Braginski. “the SQUID Habdbook”11 (2004) [16] Clarke J and Braginski A(ed)2004 The SQUID Handbook Fundamentals and Technology of SQUIDs and SQUID Systems vol 1. [17] K. Enpuku,Y. Shimomura,and T.Kisu,1993 J.Appl.Phy.73 7929. [18]Tesche and J. Clarke,Low Temp. Phys.29.301(1977)
摘要: 從許多文獻中得知超導量子干涉元件對磁場具有極高的靈敏度,可當作磁場對電壓輸出的轉換元件,本篇論文是以高溫超導釔鋇銅氧、磁控濺鍍系統、黃光微影製程、乾式濕式蝕刻以及10 mm×10 mm雙晶基板SrTiO3,在晶界上產生類似絕緣層的S-I-S穿隧機制,製作出具有高靈敏度的超導量子干涉元件,元件有效面積約為0.14 mm2,在77 K的時候觀察到此時超導量子干涉元件具有約10μΦ0/Hz1/2和14μΦ0/Hz1/2左右的磁通雜訊在1 KHz,換算後得到SB1/2約為147 fT/Hz1/2和207 fT/Hz1/2
From past literature we know superconductor quantum interference device (SQUID) is the most sensitive to detect magnetic field in the world. It can be use as a voltage-flux transfer device. Here we grow high temperature superconductor YBa2Cu3O7-x thin film on bicrystal substrate by magnetron sputter system, and use photolithography, ion milling, and wet etching to fabricate our SQUID.After that we measure R-T, I-V and V-T data at 77 K. Finally, a flux noise of approximately 10μΦ0/Hz1/2 and 14μΦ0/Hz1/2at 77 K at 1kHz has been archived, from which calculate the magnetic field sensitivity of 147 fT/Hz1/2 and 207 fT/Hz1/2 is available.
URI: http://hdl.handle.net/11455/17247
其他識別: U0005-2008201212324900
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2008201212324900
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