Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1801
標題: 整合積體電路的FET微壓力感測器
FET+Micro-pressure+sensors+integrated+with+readout+circuitry
作者: 戴銚葦
Tai, Yao-Wei
關鍵字: CMOS
金氧半場效電晶體
MOSFET
pressure sensor
readout circuits
壓力感測器
聚對二甲苯
感測電路
出版社: 機械工程學系所
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摘要: This study presents a FET (field effect transistor) micro pressure sensor manufactured by the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The benefits of the pressure sensor are easy post-process, small area, low cost, and good performance. The gate of the transistor, which is a dynamic structure, is adopted as the membrane of the pressure, and the gate-source voltage is a linear output related to the pressure when keeping constant current in the channel. The pressure sensor needs a post-process to release the membrane and seal etch-holes. The post-process utilizes wet etching to remove sacrificial layers, which are stacked layers formed from metal and via layers, to suspend the membrane of pressure sensor. Then, LPCVD parylene is used to seal the etch-holes of pressure sensor. Besides, this circuits realize a simple method to convert the current variation of the pressure sensors into the voltage output. Differential-pairs-input opera-tional amperifier has a differential- pair-mode -gain(Ad) of 40dB and a phase-margin of 60. The sensitivity of the pressure sensors are 0.032mV/kPa in pressure range of 0-500kPa.
本文利用CMOS-MEMS技術製作FET微壓力感測器,並整合積體電路。其後製程處理分為兩個階段,先以濕式蝕刻掏空金屬犧牲層,使得薄膜懸浮出來,再利用高分子Parylene封裝蝕刻孔,此微感測器以電流變化方式的原理,達到感測的效果,積體電路部分則利用電路將MOSFET的電流放大轉換為電壓訊號。 此感測器具有以下特點:(1)利用電壓控制電阻的優點,藉以調節閘極電壓改變通道電阻,使得感測器通道電阻具有可調性;(2)應用MOS閘極作為薄膜作動,當Vgs固定不變,通道電流會隨著壓力產生線性變化;(3)使用選擇性高之濕蝕刻溶液移除犧牲層鋁金屬;(4)選用LPCVD高溫裂解低溫沉積,低楊氏系數之高分子薄膜封裝感測單元。 讀出訊號部份係以一簡單之感測電路,應用一差動放大增益約(Differential Pair Gain) >40db以及相位邊際增益(PM)>60°,外加直流偏壓於閘極薄膜上Vgs=3V時,其壓力測量範圍為0-500kPa,靈敏度約0.032mV/kPa。
URI: http://hdl.handle.net/11455/1801
其他識別: U0005-0708200710042100
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-0708200710042100
Appears in Collections:機械工程學系所

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