Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1991
標題: 微定位平台之設計分析與研究
A Study on the Design and Analysis of Micro Stage
作者: 陳俋先
Chen, Lyi-Hsieh
關鍵字: Micro-Positioning Stage
精密微動平台
Plat Spring
Finite Element Method
Nature Frequency
平板彈簧
卡二定理
有限元素
自然頻率
出版社: 機械工程學系所
引用: 參考資料 1 朱濤、談大龍, “微動機器人的致動機理研究綜述”, 機械設計, 第20卷第7期, Vol. 20 No. 7, Jul 2003. 2 E. R. Pelta. “Sawyer Motor Positioning Systems.“, Proc. Conf. Applied Motor Contr., University of Minnesota, Minneapolis, MN, June 1986. 3 T. Matsuoka, M. Asano, H. Fukushima, H. Okamoto, M.Uchida and T. Matsui, “Mechanical Analysis for Micro Mobile Machine with Piezoelectric Element”, Proceedings of the1993 IEEE/RSJ International Conference on Intelligent Robots and Systems, Yokohama Japan, pp. 1165-1690, 1993. 4 T. Akiyama and H. Fujita, “A Quantitative Analysis of Search Drive Actuator Using Backing Motion”, Micro Electro Mechanical Systems, 1995, MEMS ''95, Proceedings. IEEE, 1995. 5李小凡, “微移動機器人群進行超精密加工與測量的現狀和發展”, 機器人, 2000. 6 李小凡, 王忠, 姚辰, 羅宇, 原培章, “微小移動機器人驅動原理研究”, 儀器儀表學報, 第23卷第5期, pp. 530~532, 2003. 7 S. Fatikow, U. Rembold and H.Worn, “Design and Control of Flexible Microrobots for An Automated Micro Assembly Desktop-Sation”, Proceedings of SPIE onMicrorobotics and Microsystem Fabrication, pp. 66~77, 1997. 8 S. Fahlbusch, S. Fatikow, J. Seyfried and A.l Buerkle, ”Flexible Microrobotic System MINIMAN: Design, Actuation Principle and Control”, Proceedings of the 1999 LEEWASME International Conference on Advanced Intelligent Mechatronics, 1999. 9 T. B. Lauwers, Z. K. Edmondson, and R. L. Hollis, “Free-Roaming Planar Motors: Toward Autonomous Precision Planar Mobile Robots”, Proc. IEEE Int’l. conf, on Robotics and Automation, New Orleans, LA, April 26-May 1, 2004. 10 樋口, 渡辺, 工藤, “圧電素子の急速変形を利用した超精密位置決め机構”, 精密工学会誌, Vol. 54 No. 11, pp. 2017~2112, 1988. 11 工藤, 後藤, 佐藤, 山形, 古谷, 樋口, “圧電素子をいた細胞操作用マイクロマニピュレータの開発”, 哺乳卵子動物学会社, 第7卷1号, pp. 7~12, 1990. 12 樋口, 山形, “圧電素子の急速変形を利用した超精密位置決め機構(第2報)摩擦力の大きさと移動特性”, 精密工学会誌, Vol. 58, No. 10, pp. 1759~1764, 1992. 13 Y. Yamagata, T. Higuchi, H. Saeki, and H. Ishimaru: "Ultrahigh Vacuum Precise Positioning Device Utilizing Rapid Deformations of Piezoelectric Elements", Journal of Vacuum Science and Technology, A, Vol. 8, No. 6 Nov./Dec., pp. 4098-4100, 1990. 14 樋口, 山形, 石田, “真円度測定器における自動心出し機構”, 生産研究, 第43巻11号, pp. 111~115 , 1991. 15 青山尚之, “小型自走机械群によゐ超精密生産机械シヌテム(第一扱)”, 精密工学会志, Vol. 59 ,pp. 1007~1012. 16 H. Aoyama, “Precise Miniature Robots and Desktop Flexible Production”, Applied Micro Systems Group, Robotics Engineering Division Dept. of Mechanical & Control Engineering University of lectro-Communications, http://www.aolab.mce.uec.ac.jp/ ~/IWMF.html, 2008/11/23. 17 T. Koyanagi, R. Fukui, A. Ueda, ”Miniature Robots with Three Degrees of Freedom”, International Symposium on Micromechatronics and Human Science, 2000. 18 S. Yan, F. Zhang, Z. Qin and S. Wen, “A 3-DOFs mobile robot driven by a piezoelectric acturator”, Institute Of Physics Publishing Smart Mater. Struct., 15 N7-N13, 2006. 19. 陳石生,長行程精密定位平台設計與分析,國立中興大學機械系碩士論文, 2003。 20 Physik Instrumente, NanoPositioning, Catalog US Edition, 1998. 21 J. M. Paros and L. Weisbord, “How To Design Flexure Hinge”, Machine Design, Vol. 37, pp. 151-157, Nov. 25, 1965. 22 Q. Xu and Y. Li, “Mechanical Design of Compliant Parallel, Micromanipulators for Nano Scale Manipulation”, Proceedings of the 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, January 18 - 21, 2006. 23 J. E. Shigley and C. R. Mischke, Mechanical Engineering Design, Mcgraw-hill, Inc., pp. 109~p114, 1989 24 維基百科, “Lagrangian”, From Wikipedia http://en.wikipedia.org/wiki/Lagrangian, 2008/7/10. 25 洪榮哲, 機構設計-精密定位法, 全華科技圖書股份有限公司, pp. 1-77~1-89, 1998.
摘要: 本研究之目的為對精密結構平台進行設計與分析,以作為微動機器人的一部分,在未來之最終目標是期望設計一能在全平面上作單或雙軸向自由移動之微動機器人,行程無限制,且其位移解析與定位能力能在奈米等級。在初期之目標是針對微動機器人上之結構平台進行設計、分析與實驗,利用分析與實驗的結果與理論值進行驗證。 設計時,主要以蚇蠖式運動型式作為運動之機制,設計足夠自由度以提供作單、雙軸組合移動,並針對目標設計其功能性結構,並透過理論推導該結構體之內應力、最大行程、允許最大行程及其動態特性。並比較其相互誤差,找出結構體之實際特性,包含整體結構剛性、最大位移量,允許最大位移量,可能產生之最大主應力及剪應力,並找出結構平台在其動態軸向之自然頻率。分析模擬的部分包含有靜態部分的分析與模態自然頻率的分析。而實驗的部分,則包含位移實驗與自然頻率之敲擊實驗。整體全部誤差全部都在20%範圍以內。
The objective of this research is to design a precision stage for micro mobile robot. It is hope that this robot can move on a plane along X and Y axis with nanometer precision. The mathematic models of the stage were established. The physic characteristics, such as system stiffness, maximum displacement of the stage, main stress, shear stress and natural frequency of the stage were determined through this study. Then, finite element analysis and experiment was applied to verify the accuracy of the formulation results. Finite element analysis was about static and natural frequency analysis. And the experiment was include of displacement and natural frequency experiment. These error were within 20%.
URI: http://hdl.handle.net/11455/1991
其他識別: U0005-0602200915243000
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-0602200915243000
Appears in Collections:機械工程學系所

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