Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2294
標題: 多軸精密定位平台之控制研究
A Study on The Control of Multi-Axis Precision Positioning Stage
作者: 陳龍春
Chen, Lung-Chun
關鍵字: multi axes positioning stage
多軸定位平台
flexure structures
Piezo-electric actuator
fuzzy control
撓性鉸鍊
壓電致動器
模糊控制
出版社: 機械工程學系所
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摘要: 本研究針對一個多軸定位平台之XYθ三自由度,設計適合的控制器以提升其定位精度。平台之尺寸為140mm 140mm 10mm,其結構是由多組割痕式撓性鉸鍊組合而成,致動器則是採用壓電致動器。建立平台之數學模型是使用Largrange’s equation推導而出,其數學模型之功用為定位模擬,了解控制器的能力。 在控制器的設計方面,因應其XYθ三軸之位移耦合,使用模糊控制法則設計出模糊控制器,控制器之輸入,選用XYθ三軸位移誤差及誤差微分共6個變數,輸出則設定為3個變數,分別針對XYθ三軸之位移量作補償。為了降低其規則庫設計與程式撰寫之困難,本研究將輸入變數與輸出變數依XYθ三軸分成3組,設計出由3組子控制器所組成之控制器。 定位平台之模擬結果,其X軸、Y軸與θ軸之安定時間能控制在0.02 sec以內。在平台之座標定位實驗中, XYθ三軸之誤差最大不超過0.1 和2 。
The objective of this research is to design a suitable controller for a multi axes positioning stage. The dimension of this positioning stage is 140mm 140mm 10mm, and with XYθ three degree of freedoms. Piezo-electric actuators are used to drive the stage. Largrange's equation is used to derive the mathematic model of this stage. For the controller, a fuzzy control strategy is used to overcome the coupling effect of the stage. The XYθ displacement errors and differential of these errors are selected as the input of the controller. While, the displacement compensations on XYθ axes are used as the output. In order to simplify the rule base and program, the input and output variables are divided into X, Y, θ three subgroups. The controller is then composed by three subsystems according these three subgroups. From the simulation results, the settling time on X-axis, Y-axis andθ-axis is controlled within 0.02 second. While, from the experiment result, the error on X-axis, Y-axis andθ-axis is less than 0.1 and 2 respectively.
URI: http://hdl.handle.net/11455/2294
其他識別: U0005-1908200915013200
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-1908200915013200
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