請用此 Handle URI 來引用此文件: http://hdl.handle.net/11455/2345
標題: 圓孔與圓環陣列近接曝光之繞射效應研究
An Investigation on the Diffraction Effects on Proximity Printing of Circular and Ring Arrays
作者: 謝貴璽
Sie, Guei-Si
關鍵字: Diffraction
繞射
Proximity Printing
近接曝光
出版社: 機械工程學系所
引用: [Henke et al, 1990] W. Henke, R. Schwalm, M. Weiss and J. Pelka, “Diffraction effects in submicron contact or proximity printing,” Microelectronic Engineering, Vol. 10, No. 2, Jan 1990, pp.73-89. [Vladimirsky et al, 1999] Y. Vladimirsky, A. Bourdillon, O. Vladimirsky, W. Jiang and Q. Leonard, “Demagnification in proximity X-ray lithography and extensibility to 25 nm by optimizing Fresnel diffraction,” Journal of Physics D: Applied Physics, Vol. 32, No. 22, November 21 1999, pp L114-L118. [Kopp & Meyrueis, 1998] C. Kopp and P. Meyrueis, “Near-Field Fresnel Diffraction: Improvement A Numerical Propagator,” Optics Communications, Vol.158, 1998, pp.7-10 [Song et al, 2008] I. H. Song, K. N. Kang, Y. Jin, D. S. Park and P. K. Ajmera, “Microlens array fabrication by backside exposure using fraunhofer diffraction,” Microsystem Technologies, Vol. 14, No. 9-11, October 2008, pp.1285-1290. [Cox et al, 2001] W. R. Cox, T. H. Chen and J. Donald, “Micro-Optics Fabrication by Ink-Jet Printing,” Optics & Photonics News, Vol. 12, No. 6, June, 2001, pp.32-35. [Hecht, 2002] E. Hecht, Optics, 2002, Addison Wesley, Chap. 9-10. [Lin et al, 2003] C. P. Lin, H. Yang and C. K. Chao, “A New Microlens Array Fabrication Method Using UV Proximity Printing,” Journal of Micromechanics and Microengineering, Vol. 13, No. 5, September 2003, pp.748-757. [Ovchinnikov, 2003] Y. B. Ovchinnikov, “Fresnel Interference Pattern of A Triple-Slit Interferometer,” Optics Communications, Vol. 216, No.1-3, February 1, 2003, pp.33-40. [Arshak et al, 1991] A. Arshak, N. N. Kundu, K. Arshak and S. N. Gupta, “Three-dimensional simulation of proximity printing,” Microelectronic Engineering, Vol. 14, No. 1, Apr 1991, pp.41-58. [Meliorisz et al, 2007] B. Meliorisz, P. Evanschitzky and A. Erdmann, Andreas, “Simulation of proximity and contact lithography,” Microelectronic Engineering, Vol. 84, No. 5-8, May/August 2007, pp.733-736. [Dubner et al, 1992] A. D. Dubner, A. Wagner, J. P. Levin and J. Mauer, “Diffraction effects in x-ray proximity printing,” Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, Vol. 10, No. 5, Sep-Oct 1992, pp.2234-2242. [Antje et al, 1998] K. Antje, S. Robert, G. Timothy, F. Patricia and v. B. Peter, “Measurement of diffraction efficiencies relevant to crystal lens telescopes,” Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 416, No. 2-3, Oct 1998, pp.493-504. [Shigeru et al, 2002] K. Shigeru, H. Mika, H. Kazuyuki and T. Naoto, “Diffraction measurement of grating structure induced by irradiation of femtosecond laser pulse in acrylate block copolymers,” Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 41, No 4, April 2002, pp.2155-2162. [Roshchupkin et al, 2009] D. V. Roshchupkin, A. I. Erko, L. Ortega and D. V. Irzhak, “X-ray diffraction analysis of the surface acoustic wave propagation in langatate crystal,” Applied Physics A: Materials Science and Processing, vol. 94, No. 3, March 2009, pp.477-484. [趙&鍾,1997] 趙凱華,鍾錫華,光學,儒林出版社,1997年。 [耿&何,1994] 耿繼業,何建娃,幾何與物理光電實驗,儒林出版社,1994年。 [張,2000] 張智星,MALAB程式設計與應用,清蔚科技出版,2000年。 [洪,2006] 洪維恩,Matlab 7 程式設計,旗標出版股份有限公司,2006年。 [莊,2003] 莊達人,VLSI製造技術,高立圖書有限公司,2003年。 [謝,2004] 謝孟昀,圓孔陣列微影製程之光學繞射效應研究,國立中興大學機械研究所碩士論文,2004年。
摘要: 本研究利用Huygens-Fresnel繞射理論為基礎,推導出圓孔光罩之繞射理論及圓環繞射理論,並將所推導出的光波方程式無因次化,利用無因次化參數ξX、ξλ、ξa來探討光強度之變化。文中利用MATLAB軟體作數值運算及光強度分布之2D、3D理論的模擬,觀察不同參數下光強度的情況。研究中亦規劃實驗以驗証理論模擬之正確性,實驗過程用了三種不同尺寸的圓孔及圓環光罩,繞射實驗顯示,當ξX=1~2時繞射的現象並沒有很明顯,在ξX=5時就可以看出曝光區與非曝光區交界處,因繞射效應使得影像變的模糊;若光源強度相同時,當ξλ越大,則光強度越大,而ξλ越小時,則光強度越小;ξa越接近1時,較強的光強度位置會往曝光區外圍靠近,此實驗結果與理論模擬之結果相當一致。本研究之主要貢獻在於利用基礎光學理論所推導出的繞射理論可以說明近接式曝光影像變形的成因,並透過實驗驗證其正確性。
URI: http://hdl.handle.net/11455/2345
其他識別: U0005-2108200915024400
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2108200915024400
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