Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2797
標題: 偵測氨氣和乙醇的微氣體感測陣列
Gas Sensing Microarray for Detecting Ammonia and Ethanol
作者: 廖維溱
Liao, Wei-Zhen
關鍵字: CMOS-MEMS
CMOS-MEMS
氣體感測陣列
氧化鋅
聚苯胺
乙醇感測器
氨氣感測器
Gas sensing array
Zinc oxide
Polyaniline
Ethanol sensor
Ammonia sensor
出版社: 機械工程學系所
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摘要: 本研究利用氧化鋅以及聚苯胺當作感測薄膜,整合感測電路,製作出微氣體感測陣列用於偵測乙醇及氨氣。製作上利用0.18 CMOS-MEMS製程製作出披覆感測薄膜氧化鋅及聚苯胺之晶片,晶片內有指叉結構感測電極、加熱器以及溫度計,晶片可以提供感測薄膜一個穩定的工作環境。氧化鋅及聚苯胺則是利用溶膠凝膠法調製成溶液後,披覆於晶片上,經過高溫熱退火,即可完成感測薄膜氧化鋅與聚苯胺。感測電路則是利用雕刻機,在印刷電路板上,刻出電路圖後,在匹配好電阻,與晶片相接,即完成微氣體感測陣列。本研究之微氣體感測陣列製作方法容易、低成本且易於大量製作。 微氣體感測陣列在偵測到乙醇時,主要依據氧化鋅感測薄膜的反應,而當在偵測到氨氣時,則以聚苯胺的變化為主。量測結果顯示,氧化鋅在350 ℃下對乙醇有最高的靈敏度,150 ppm下靈敏度有35 %,而室溫下聚苯胺薄膜對150 ppm乙醇的靈敏度只有0.3 %。而350 ℃下氧化鋅對100 ppm氨氣的靈敏度只有2.5 %,遠小於聚苯胺薄膜的25 %,因此藉由比較此兩種薄膜對兩種氣體反應後,所得到的數據資料,即可判斷所偵測到的氣體種類。
This study presents the fabrication and characterization of gas sensing microarray for detecting ethanol and ammonia. The microarray uses zinc oxide and polyaniline as sensing materials and integrates the sensing circuits. The gas sensing microarray is fabricated using the commercial 0.18 m CMOS (complementary metal oxide semiconductor) process. The microarray includes interdigitated sensing electrodes, heaters and thermometers. The heaters provide a stable working temperature for sensing films. The sol-gel method is adopted to prepare zinc oxide and polyaniline, and they are coated on the microarray, respectively. The sensing materials are annealed with high temperature. When the sensing materials sense the reaction gas, the resistance of the sensors produces a change. The sensing circuits made on the printed circuit board are utilized to convert the resistance variation of the sensors into the output voltage. The advantages of the gas sensing microarray are easy fabrication, low cost and easy mass productions. The zinc oxide is used to detect ethanol, and the polyaniline is utilized to sense ammonia. The experimental results showed that the zinc oxide at 350 ℃ had the best sensitivity for ethanol, and its sensitivity was 35 % at 150 ppm ethanol. The sensitivity of polyaniline was 25% at 100 ppm ammonia. For gas selectivity, the sensitivity of zinc oxide was only 2.5% at 350 ℃ in 100 ppm ammonia, so the zinc oxide has a good selectivity for ethanol. Therefore, the ethanol and ammonia gas can be known by the sensitivity and selectivity of sensing materials.
URI: http://hdl.handle.net/11455/2797
其他識別: U0005-2008201315274100
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2008201315274100
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