Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2817
標題: 利用飛秒雷射直寫技術製作不銹鋼微結構
Fabrication of micro-structures on stainless steel using femtosecond laser direct writing technology
作者: 蔡憲哲
Tsai, Xian-Zhe
關鍵字: 飛秒雷射
Femtosecond Laser
雷射直寫
扇形高度
雷射誘發週期表面微結構
Laser direct writing
Scallop high
Laser induced periodic surface structure
出版社: 機械工程學系所
引用: 1. B. N. Chichkov, C. Momma, S. Nolte, and F. V. Alvensleben, “Femtosecond picoseconds and nanosecond laser ablation of solids,” Applied Physics A, Vol. 63, pp. 109-115, (1996) 2. B. Rethfeld, K. Sokolowski-tinten, D. V. D. Linde, and S. I. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Applied Physics A, Vol. 79, pp. 767-769, (2004) 3. Max Groenendijk, and Johan Meijer, “Microstructuring using femtosecond pulsed laser ablation,” Journal of Laser Applications Vol. 18, Issue 3, pp. 227-235, (2006) 4. Vural Kara, and Huseyin Kizil, “Titanium micromachining by femtosecond laser,” Optics and Lasers in Engineering, Vol. 50, pp. 140-147, (2012) 5. Machado, L. M., Samad, R. E., Freitas, A. Z., Vieira Jr., N. D., and de Rossi, W. “Microchannels Direct Machining using the Femtosecond Smooth Ablation Method, Physics Procedia ,Vol 12 pp. 67–75,(2011) 6. Manuel Pfeiffera, Andy Engela, Steffen Weismantela, Stefan Scholzea, and Guenter Reisse “Microstructuring of Steel and Hard Metal using Femtosecond Laser Pulses,” Applied Physics A, Vol. 12, pp. 60-66, (2011) 7. R. Lin and Y. Koren, “Efficient Tool-Path Planning for Machining Free-Form Surfaces,” ASME Journal of Engineering for Industry, Vol. 188, No. 1, pp. 20-28, (1996) 8. P. T. Mannion, J. Magee, E. Coyne, G. M. Connor, and T. J. Glynn, “The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air,” Applied surface science, Vol. 233, pp. 275-287, (2004) 9. J. Stasic, B. Gakovic, W. Perrie, K. Watkins, S. Petrovic, and M. Trtica, “Surface texturing of the carbon steel AISI 1045 using femtosecond laser in single pulse and scanning regime,” Applied Surface Science, Vol. 258, pp. 290-296, (2011) 10. M. Meunier, B. Fisette, A. Houle, A. V. Kabashin, S. V. Broude, and P. Miller, “Processing of metals and semiconductors by a femtosecond laser-based micro fabrication system,” SPIE USE, Vol. 6 4978-32 pp. 1-11, (2003) 11. G. Dumitru, V. Romano, H. P. Weber, M. Sentis, and W. Marine, “Femtosecond ablation of ultra hard materials,” Applied Physics A Materials Science and Processing, Vol. 74, pp. 729-739, (2002) 12. 李怡閔,“不同飛秒雷射波長對氧化銦錫加工結果探討”國立中正大學機械工程學系 碩士論文 (2010) 13. Emir Mutapcic, Pio Lovenitti, and Jason P. Hayes, “A 3D-CAM system for quick prototyping and micro fabrication using excimer laser micromachining,” Micro system Technology, Vol. 25, pp. 128-136, (2005) 14. Daniel Schaper, “Automated quality control for micro-technology components using a depth from focus approach,” IEEE Computer Society, (2002) 15. S. W. Youn, M. Takahashi, H. Goto, and R. Maeda, “Micro structuring of glassy carbon mold for glass embossing–Comparison of focused ion beam, nano/femto second-pulsed laser and mechanical machining,” Microelectronic Engineering, Vol. 83, pp. 2482-2492, (2006) 16. Raffaella Suriano, Arseniy Kuznetsov, Shane M. Eaton, and Roman Kiyanb, “Femtosecond laser ablation of polymeric substrates for the fabrication of microfluidic channels,” Applied Surface Science, Vol. 257, pp. 6243-6250, (2011) 17. Ren C. Luo Fellow, and Jyh Hwa Tzou, “Investigation of a Linear 2-D Planar Motor based Rapid Tooling System,” Proceedings of the IEEE International Conference on Robotics & Automation Washington, pp.1471-1476, (2002) 18. Peter Heyl, Thomas Olschewski and Roelof W. Wijnaendts, “Manufacturing of 3D structures for micro-tools using laser ablation,” Microelectronic Engineering, pp. 775-780, (2001) 19. 鄭中緯與陳政雄,“飛秒脈衝雷射之精密加工技術” 機械月刊 (2008) 20. 吳秉翰、沈威志、簡志維與鄭中緯,“飛秒雷射加工矽晶圓之特性研究”機械工業雜誌 (2009) 21. 吳秉翰、蔡武融、鄭中緯與沈威志,“飛秒雷射誘發功能微奈米結構製作技術”(2009) 22. 紀兆南,“雷射直寫技術於金屬微結構加工與拋光之研究”國立中正大學機械工程學系 碩士論文 (2004) 23. 王嘉興,“單晶鑽石的雷射微結構加工之研究”國立中正大學機械工程學系 碩士論文 (2005) 24. 陳亮澤,“水輔助雷射加工不銹鋼304表面微結構之研究”國立中正大學機械工程學系 碩士論文 (2006) 25. 李評翔,“利用飛秒雷射與化學蝕刻在光敏玻璃內部製作微流道與加工參數探討”國立中正大學機械工程學系 碩士論文 (2009) 26. 萬柏男,“利用飛秒雷射技術製作微奈米結構玻璃模仁”國立中正大學機械工程學系 碩士論文 (2010)
摘要: 在本論文中,利用飛秒雷射直寫技術對不銹鋼SUS304進行剝除實驗,透過固定單一掃描速度,調整能量大小與相鄰移動路徑之重疊率,在不銹鋼SUS304表面製作金屬微結構,再使用光學顯微鏡(OM)、3D表面輪廓儀(Confocal)、電子顯微鏡(SEM)做觀察。本篇重點將著重在探討殘留量之高低與模型準確性,若是可以推導出雷射專屬的預測模型,那麼就可以從殘留量的高低去算出我們想要的相鄰移動路徑大小。 在掃描速度0.5mm/s下,以飛秒雷射(120fs、1kHz、800nm)、能量1-3mW,製作金屬微結構,利用高斯雷射光束中心極小區域產生非線性吸收進行材料移除,搭配著傳統機械加工的概念,改變相鄰移動路徑進行剝除加工,對殘留量進行模擬預測,發現相鄰移動路徑大時(重疊率低),模擬殘留量高度與實驗數據相差約0.1-0.2μm,其殘留外型呈現扇形居多。相鄰移動路徑小時(重疊率高),仍因能量累積的效應,故不做探討只拍攝SEM圖進行表面形貌觀察。從實驗結果發現,利用能量略高於剝除門檻約1mW上下進行之加工時,在重疊率達到40%以前進行殘留量模擬預測,其誤差範圍可小於0.1μm內,未來可應用在超精密模具製作。 最後,嘗試在不銹鋼SUS304表面利用飛秒雷射誘發週期表面結構,藉由改變相鄰移動路徑大小,進行面積式重疊加工。其雷射偏振方向為線偏振,且在10X、N.A 0.26物鏡聚焦表面時,發現雷射能量在0.2-1mW之間皆會誘發週期性光柵式結構,誘發之光柵式結構其寬度約為450nm上下、週期在250-300nm之間,結構方向與電場垂直。
This study will be focused to investigate the level of residues of high, low and model accuracy. If it can be deduced from the laser''s proprietary forecasting model, it also can used the level of residues of high and low to figure out what we want, the value of the adjacent moving path. Under the scanning speed of 0.5mm/s, We make use of the femtosecond laser (120fs, 1kHz and 800nm),the energy of 1-3mW,the manufacture metal micro-structures. With the concept of the traditional machining, and utilizing a very small region of the Gaussian laser beam center to generate the nonlinear absorption material removal, changing the adjacent to move path execute ablation experiment, simulation and prediction of residues, the adjacent of moving path is high (overlap low), it show that the height of the analog residues with the experimental data, we find the difference of about 0.1-0.2μm and the residual appearance showing the fan majority. Adjacent to the adjacent moving path is low (overlap high), because of the result of the energy cumulative effect, we do not explore the result, only shoot SEM images of the surface morphology. From the experimental results, we found that when used the energy slightly higher than the ablation threshold of about between 1mW to machined, and the simulation and prediction of residues in the overlapping rate before of 40%, the error range is less than 0.1μm.In the future, it can be used in the ultra-precision mold making. Finally, this study also focus on using femtosecond laser to induce to the periodically structure on the surface of the Stainless steel SUS304 and the laser polarization direction is linearly polarized. When in the microscope objective for the surface (10X, N.A 0.26) and the laser energy are between 0.2-1mW,can find the grating structure that width is between of 450nm,the cycles is between of 250-300nm and the structure direction plumb on the electric field.
URI: http://hdl.handle.net/11455/2817
其他識別: U0005-2008201200205900
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2008201200205900
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