Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2982
標題: Study On Nanostructure Silicon Thin Film Solar Cells
奈米結構薄膜矽太陽電池研究
作者: 鍾明憲
Jhong, Ming-Sian
關鍵字: nanostructure
奈米結構
silicon thin film
hydrogen plasma
solar cells
矽薄膜
氫電漿
太陽電池
出版社: 光電工程研究所
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摘要: In this thesis,at first we utilize the method of forming neat PS nanoball lithograth to apply on a-Si glass substrate,and then fabricate a-Si nanorod by using ICP-RIE.Second,we apply hydrogen surface plasma on a-Si nanorod.And last,we utilize PECVD system deposit N-type a-Si thin film, to fabricate nanostructure silicon thin film solar cells. My experiment result show that: in proper the hydrogen plasma power,processing time,pressure.We can get the optimal processing condition of hydrogen surface plasma.Using the optimal hydrogen surface plasma to deal with the a-Si nanorod which had discussed in proper the ICP power,RF power,etching pressure,etching gas flow,etching time.The nanostructure device can be improved by hydrogen surface plasma. Then,we utilize the UV-VIS,and IPCE to disscuss the property of absorptive absorpticn of i nanorod or not,at the same time,we analyze the property of electric to the different type device which are PI/N , P/I nanorod/N , P/I nanorod/H2 plasma/N.
本實驗研究著重在三個部分,分別是非晶矽錐狀奈米柱薄膜的製作、非晶矽錐狀奈米柱薄膜其光學與電學特性分析與氫電漿表面處理結合非晶矽錐狀奈米柱薄膜太陽電池元件分析與比較。 在這篇論文中,首先利用電漿輔助化學氣相(PECVD)沉積合乎文獻要求的本質非晶矽薄膜並利用塊狀共聚合物薄膜PS-b-PMMA形成均勻且大小適中的奈米球與良好品質的奈米金網,利用PS奈米球與奈米金網當做蝕刻遮罩製作於本質非晶矽薄膜上作奈米微影,並利用感應式耦合電漿離子乾蝕刻機製作非晶矽錐狀奈米柱薄膜結構,再利用電漿輔助化學氣相沉積機進行氫電漿表面處理,接者沉積N-type非晶矽薄膜,完成非晶矽錐狀奈米柱太陽能電池。 本研究探討在適當的上下電極功率、蝕刻時間、蝕刻氣體流量、蝕刻時反應腔室壓力與蝕刻輔助氣體氧氣流量下藉由品質良好的蝕刻遮罩輔助反應式偶合電漿乾式蝕刻製作出合適的本質非晶矽錐狀奈米柱薄膜結構。 接者,針對氫電漿表面處理進行實驗設計,討論氫電漿表面處理的製程壓力、電漿功率、氫電漿處理時間對元件特性的影響,並選擇適當的氫電漿表面處理製程條件,作為本質非晶矽錐狀奈米柱薄膜的氫電表面處理條件。 接著利用紫外光-可見光光譜分析儀探討在製作非晶矽錐狀奈米柱薄膜結構前後,薄膜中的薄膜光學吸收係數的變化並藉由分光轉換效率量測系統(IPCE)的輔助量測元件在各波長的光電轉換率,並利用I-V量測系統量測元件暗電流特性,探討經過氫電漿表面處理後元件的二極體特性變化,再由AM 1.5校正太陽光模擬器量測三種不同結構製程條件的太陽能電池元件的電性比較。
URI: http://hdl.handle.net/11455/2982
其他識別: U0005-2707201012433400
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2707201012433400
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