Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/40032
標題: (Jpn. J. Appl. Phys.,42(12A):L1416-L1418)Fast Grain Growth of Metal-Induced Lateral Crystallization of Amorphous Silicon Using Rapid Energy Transfer Annealing
作者: Yeu Long Jiang
Chi Lin Chen
Chiung Wei Lin
Shun Fa Huang
關鍵字: grain growth
nickel metal-induced lateral crystallization (MILC)
amorphous silicon
rapid energy transfer annealing
polysilicon
出版社: Japan:Japan Society of Applied Physics
URI: http://hdl.handle.net/11455/40032
ISSN: 1347-4065
Appears in Collections:光電工程研究所

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