Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4016
標題: 以類LIGA技術與紫外光固化膠製作微透鏡陣列之新式製程設計探討
A NEW METHOD USING LIGA-LIKE TECHNOLOGY AND UV CURING GLUE TO FABRICATE MICROLENS ARRAY
作者: 黃俊瑋
Huang, Jiun-Wei
關鍵字: LIGA-like
類深刻模造技術
Micro-lens Array
UV CURING GLUE
微透鏡陣列
紫外光固化膠
出版社: 精密工程研究所
摘要: 本研究為研發一新式製作微透鏡製程。其製作步驟為先以厚膜光阻SU-8製出微六角陣列細管,再將UV固化膠填入微六角陣列管柱中,接著搭配旋出多餘的膠與UV燈源照射固化,將微凹形透鏡模具製成,續以PDMS翻模成凸透鏡。實驗改變將膠旋出之旋轉參數(5500rpm、5000rpm、4500rpm)、微六角細管開口(100μm、75μm)與陣列微管柱間隔之距離(5μm、10μm、15μm、20μm);研究中發現微細管柱內膠之多寡將決定凹形微透鏡之深度與翻模後微凸透鏡高度,而微六角管開口越大、旋膠轉速越快與陣列細管間隔距離越小,可將UV膠排出較多,將可得到較深之凹形微透鏡,即有翻模後較高微透鏡高度;而實驗中已做到最大透鏡高度達到10.82μm。
A new method for fabricating microlens array is proposed in this research. Three steps in this fabrication technique are included. First, using the photoresist SU-8 to fabricate hexagonal microchannel array is required. Second, UV curable glue is to fill up hexagonal microchannel array. Third, the surplus glue can be spun by spinner and exposed by using UV lamp to harden UV glue. The micro concave lens molds are finished and can be molded into convex lens by PDMS. Different experimental parameters including spin speed(5500rpm、5000rpm、4500rpm), hexagonal microchannel size(100μm、75μm) and various pitches of hexagonal microchannel(5μm、10μm、15μm、20μm) were studied. In this research, the amount of UV glue can determine the micro concave lens mold profiles and convex lens sag heights. A large hexagonal microchannel size and a higher spin speed can generate a higher sag of concave lens mold. Then, a shorter pitch of hexagonal microchannel results in a deep concave profile.
URI: http://hdl.handle.net/11455/4016
Appears in Collections:精密工程研究所

文件中的檔案:

取得全文請前往華藝線上圖書館



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.