Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4027
標題: 非對稱微透鏡陣列設計製作研究
Research of design and fabrication on asymmetric microlens array
作者: Lin, Ying-Fei
林盈妃
關鍵字: photolithography
thermal reflow process
microlens array
asymmetrical microlens
tilt angle
出版社: 精密工程學系所
摘要: 本研究的目標為開發具有特定傾斜角&;#64001;之新式非對稱微型透鏡陣&;#63900;,由黃光微影技術製作出具有非對稱微透鏡形貌之光阻結構,接著再鍍上&;#63754;屬薄膜之後進&;#64008;觀察&;#63870;測。在實驗進&;#64008;中,&;#63965;用光線的&;#64008;進原&;#63972;,搭配&;#63847;同的曝光角&;#64001;,之後再配合&;#63847;同的熱熔傾斜角&;#64001;,經過歸納整&;#63972;可簡單地控制與決定非對稱微透鏡之傾斜角&;#64001;。本實驗之第一個部份,主要控制因子為透鏡之直徑尺寸大小,分別為200μm、400μm以及600μm;第二個部份,主要是基板擺放之傾斜曝光角&;#64001;分別為30°、45°、60°;第三個部份,主要是熱熔時,因透鏡本身直徑&;#63847;同,傾斜倒置熱熔時所受之重&;#63882;影響亦&;#63847;相同,所擺放角&;#64001;為45°及90°。本製程最大的優點在於&;#63965;用此製程,可以將單ㄧ簡單的光罩,透過本製程中的各種&;#63847;同的&;#63851;&;#63849;配合與改變,已成功地製作出傾斜角&;#64001;為20°~50°之非對稱微透鏡陣&;#63900;。使用相對於其他方法之低成本製程,且此方法是可以達到&;#63870;產實現化的設計與技術。
This study aims at the development of novel asymmetric microlens array with certain inclined angles. The asymmetric microlens array profiles was defined by the photolithography process and observed by a confocal microscope with sputter a thin metal film. In the experiments, using the light path and different exposure and thermal reflow angles can control and determine asymmetric microlenses with certain inclined angles easily. The first part of this experiment, the dominant controlling factor was the lens diameters which were 200μm, 400μm and 600μm respectively. The second part was the tilt angles of substrate in exposure at 30 °, 45 °and 60 °. The third part was to study the gravity effect in thermal reflow at the laying angles 45 ° and 90 ° related to different lens diameters. The greatest advantage of the process was one single mask can fabricate different asymmetric microlens array by using different parameters. In this thesis, the asymmetrical microlens array with inclined angles between 20゚and 50゚ have been produced successfully. Compared with other methods, this method is more cost competitive and can be realized the design and production technology.
URI: http://hdl.handle.net/11455/4027
Appears in Collections:精密工程研究所

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