Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4042
標題: 銅金屬雷射切割之研究
The Study of Laser Dicing on Copper Metal
作者: 林高亨
Lin, Kao-Heng
關鍵字: Q-switched Nd:YVO4 Laser
Q-開關Nd:YVO4雷射
Taguchi's Experiment Method
Copper Metal
Analysis of Variance
田口實驗法
銅金屬
變異數分析
出版社: 精密工程學系所
引用: [1] R. M. Lumley, “Controlled Separation of Brittle Materials Using a Laser,” American Ceramic Society Bulletin, Vol. 48, pp. 850-854, 1969. [2] A. Slocombe, L. Li “ Laser ablation machining of metal/polymer composite materials,” Applied Surface Science, 154-155, 617-621, 2000. [3] W. Roelof Wijnaendts, Peter. Heyl and Thomas Olschewski “ Manufacturing of 3D structures for micro-tools using laser ablation ,”Microelectronic Engineering, 57-58, 775-780, 2001. [4] K. C. Yung, Bin Zhang “ Frequency-tripled Nd:YAG laser ablation in laser structuring process,” Optics and Lasers in Engineering, vol. 44, 815-825, 2004.[5] M. A. Saifi, R. Borutta, “Optimization of Pulsed CO2 Laser Parameters for Al 2O3 Scribing ,” American Society Ceramic Bulletin, Vol 54, NO 11, pp. 986-989, 1975. [6] A. Dupont, P. Caminat and P. Bournot“ Enhancement of material ablation using 248, 308, 532, 1064 nm laser pulse with a water film on the treated surface ,” J. Appl. Phys., vol. 78, No. 3, 1995. [7] E. Gyorgy, I. N. Mihailescu and P. Serra and J. L. Morenza “ Crown-like structure development on titanium exposed to multipulse Nd:YAG laser irradiation,” Appl. Phys. A Vol. 75, 755-759, 2002. [8] X. Zhu, “A new method for determining critical pulse width in laser material processing,” Applied Surface Science, 167, 230-242, 2000. [9] T. Wiliam Silfvast, “LASER FUNDAMENTALS,” Cambridge University Press, 1996. [10] C. H. Li, M. J. Tsai and C.D. Yang,“Study of optimal laser parameters for cutting QFN packages by Taguchi’s matrix method, ” Optics & Laser Technology, 37, 786–795, 2005. [11] 劉克琪, “實驗設計與田口式品質工程,” 華泰出版社, 台北市, 1994 [12] 羅錦興, “田口品質工程指引,” 中國生產力中心, 台北市, 1999 [13] 蘇朝墩, “品質工程,” 中華民國品質學會, 台北, 2005 [14] 周文賢, “統計學,” 智勝文化事業有限公司, 台北, 1997 [15] 田口品質工程組翻譯, “田口式品質工程講座3 品質評價的SN比,” 中國生產力中心, 台北, 1999年九月 [16] 田口品質工程組翻譯, “田口式品質工程講座4 品質設計的實驗計畫法,” 中國生產力中心, 台北, 1999年11月 [17] 黎正中譯, “穩健設計之之品質工程,” 台北圖書公司, 1993 [18] 丁勝懋, “雷射工程導論,” 中央圖書出版社, 台北, 1993 [19] 馬英俊, “雷射(基本原理及應用),” 俆氏基金會出版社, 台北, 1991 [20] 張振燦, “雷射與加工, ” 亞太圖書出版社, 台北, 1986 [21] 蘇品書, “雷射加工技術, ” 復漢出版社有限公司, 台南, 1998 [22] 蔡宗河, “CO2雷射加工, ” 詮華克季圖書股份有限公司, 台北, 1985 [23] 劉海北, 莊世欽, “雷射加工, ” 國科會光電小組, 台北, 1987 [24] 林三寶, “雷射原理與應用, ” 全華科技股份有限公司, 台北, 1990 [25] 胡木浩, “雷射切割不鏽鋼之粗糙度預測模式探討, ” 碩士論文, 國 立屏東科技大學, 2003 [26] 吳政霖, “雷射對陶瓷鑽孔的特性分析及預測模式之探討, ” 碩士論 文, 國立屏東科技大學, 2003
摘要: 本研究之目的係利用Q-開關Nd:YVO4雷射,應用於銅金屬材料微加工之研究,論文主要目標為提高切割深度及縮小切割寬度,本研究利用田口實驗法將控制因子配置於直交表內來進行實驗。實驗完成後,將量測數據進行變異數分析,取得最適化切割參數組合,預測結果,並找出參數對品質特性的重要性。再進行確認實驗,藉以獲得較佳的切割深度與寬度。 結果顯示切割深度最適化參數組合為輸出電流36 A、脈衝頻率15 kHz及脈衝寬度為600 ns,切割結果深度為261.64 um,切割寬度最適化參數組合為輸出電流30 A、脈衝頻率25 kHz及脈衝寬度為500 ns,切割結果寬度為19.35 um。經由變異數分析計算結果,對切割深度、寬度影響最大的參數為脈衝頻率,其次為輸出電流。其中影響雷射切割深度之主要控制因子貢獻值脈衝頻率為93.3947 %、輸出電流為4.4034 %,影響切割寬度之主要控制因子貢獻值脈衝頻率為92.2013 %、輸出電流為7.3927 %。本論文提供上述切割參數對材料深寬比值之影響,利用以上最佳參數可得切割深度S/N比為48.347 dB,切割寬度S/N比為-25.843 dB,希望此研究可提升產業最佳化切割銅之參數之評估方法。
The purpose of this research is to use the Q-switched Nd:YVO4 laser, applies research to the copper metal material micromachining, the paper essential target cutting the depth for the enhancement and reduces cutting the width, this research''s making use of the Taguchi's experiment method will control factor to install in keep handing Orthogonal array inside to start experiment. After the experiment completes, measurement the data will carry on the Analysis of Variance (ANOVA), will obtain suitably cutting the parameters combination, predict a result, and find out parameters importance for the quality characteristic. Again carries on the confirmation experiment, so as to obtain better cutting the depth and the width. The result showed the most suitable parameters for cutting the depth of copper being combination the output current 36 A, the pulse frequency 15 kHz and the pulse width is 600 ns. Using the above parameters, the cutting depth is 261.64 um. As concerning the cutting width, the most suitable parameter is the output current 30 A, the pulse frequency 25 kHz and the pulse width 500 ns. Using the above parameters, the cutting width is 19.35 um. By the Analysis of Variance table the most important parameter for the cutting depth and width is the pulse frequency, and then is the output current. The pulse frequency and output current of the contribution factors are 93.3947 % and 4.4034 % for the cutting depth. On the other hand, pulse frequency and output current of the contribution factor are 92.2013 % and 7.3927 % for the cutting width. The main contribution of the thesis is to provide the evaluating method to cut the copper by laser cutting.
URI: http://hdl.handle.net/11455/4042
其他識別: U0005-0502200709272700
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-0502200709272700
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