請用此 Handle URI 來引用此文件: http://hdl.handle.net/11455/4044
標題: 適用於電子束書寫機真空腔體之小型滾輪驅動模組設計與量測研究
Design and measurement study of a small roller drive module for the vacuum chamber in E-beam writers
作者: 周邦壕
CHOU, PANG-HAO
關鍵字: roller
轉軸
tilt
micro roller-pressing
V-block
Eddy Current Probe Inspection
偏擺度
微結構滾壓成形
V溝槽
渦電流探頭檢測法
出版社: 精密工程學系所
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摘要: 本研究重點是設計與製作一轉軸平台機構,探討在4吋晶圓大小面積範圍內、整體高度低於10mm、直徑3mm之試桿轉軸,其旋轉偏擺度小於5μm,且能連續運轉數小時之抽換式機構設計,以提供具快速、連續、量產等優點之微結構滾壓成形技術上,滾軸表面微結構設置機構製作時之參考。首先利用V溝槽的架構概念,進行平台主機體外型之初步設計,完成一易於抽換之設計需求,並利用線切割放電加工機與綜合切削中心機等機具,進行平台機構之精密加工。再使用直流無刷(DC Brushless)馬達,搭配蝸桿及蝸輪組等配件,自行組裝達每分鐘10轉以內的減速機構,製作完成符合功能要求之模組結構。而該模組之精度量測,乃應用三次元量床,量測試桿轉軸真圓度誤差在8μm以內。利用渦電流探頭檢測法,量測試桿轉軸偏擺度在8μm之內。利用光感測器及影像擷取方式,量測轉速達每分鐘9轉以內,製作完成符合整體實驗需求的轉軸平台機構。
This research offers a fabrication method for a small roller drive in vacuum chamber for E-beam writer system. The total stature is less than 10mm, and the cylinder diameter is 3mm in a 4 inch wafer area. The rotational variance of the replaceable cylinder is kept within 5μm and it can work several hours. It is fast、successive and abundance in micro roller–pressing, its scheme includes the following parts. First, the working stage using the V-block idea to finish a easier replaceable cylinder in the initial design. Second, the Wire Electrical Discharge Machining and CNC Machining Centers to manufacture the cylinder working stage are included. Third, using the DC Brushless motor and collocating the decelerate mechanism with Worm and Worm Wheel to make the motor decelerating less than 10rpm is designed. The Roundness variation of the roller measured by the Coordinate Measuring Machine is less than 8μm. The tilt of the roller measured by the Eddy Current Probe Inspection is also less than 8μm. The color sensor and video capture to measure the rotational speed and the measured rotational speed is less than 9rpm. The cylinder working stage is completed as the anticipated design. .
URI: http://hdl.handle.net/11455/4044
其他識別: U0005-0502200710201400
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-0502200710201400
顯示於類別:精密工程研究所

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