Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4062
標題: 可攜無閥蠕動式微泵浦製作與分析
Fabrication and Analysis of Portable Valve-less Peristaltic Micropump
作者: 胡竣傑
Hu, Chun-Chieh
關鍵字: peristaltic
蠕動式
micropump
piezoelectric
polydimethylsiloxane
微泵浦
壓電片
聚二甲基矽氧烷
出版社: 精密工程學系所
引用: [1] 國科會精儀中心,微機電系統技術與應用,2003。 [2] M. Koch, N. Harris, A. Evans, N. White and A. Brunnschweiler, “A novel micromachined pump based on thick –film piezoelectric actuation,” Sensors and Actuators, vol.70, pp. 98-103, 1998. [3] R. Zengerle, J. Ulrich, S. Kluge, M. Richter and A. Richter, “A bidirectional silicon micropump,” Sensors and Actuators, vol.50, pp. 81-86, 1995. [4] J. Jang and S. S. Lee, “Theoretical and experimental study of MHD micropump,” Sensors and Actuators, vol.80, pp. 84-89, 2000. [5] E. Stemme and G. Stemme, “Valveless Diffuser/Nozzle Based FluidPump,”Sensors and Actuators, Vol.39, pp. 159-167, 1993. [6] W. L. Benard, H. Kahn, A. H. Heuer and M. A. Huff, “A Titanium-Nickel Shape Memory Alloy Actuated Micropump,” Solid -State Sensors and Actuators, pp.361-364, 1997. [7] W. J. Spencer, W. T. Corbett, L. R. Dominguez and B. D. Shafer, “An Electronically Controlled Piezoelectric Insulin Pump and Valves,”IEEE Transactions on Sonics and Ultrasonics, Vol. 25, pp. 153-167, 1978. [8] J. G. Spencer, “Piezoelectric Micropump with Three Valves Working Peristaltically,” Sensor and Actuators, Vol.21-23, pp. 203-206, 1990. [9] F. C. M. van de Pol, H. T. G. van Lintel, M. Elwenspoek and J. H. J. Fluitman, “Thermopneumatic Micropump Based on Micro-engineering Techniques,” Sensors and Actuators, Vol.21, pp. 198-202, 1990. [10] M. A. Unger, H. P. Chou and T. Thorsen, A. Scherer and S. R. Quake, “Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography,” Science, Vol.288, pp. 113-116, 2000. [11] A. Olsson, G. Stemme, E. Stemme, “A valve-less planar fluid pump with two pump chambers,” Sensors and Actuator : Physical, Vol.46-47, pp. 549-556, 1995. [12] A. Olsson, “Valve-less Difusser Micropumps,” Instrumentation Laboratory Department of Signals, Sensors and Systems Royal Institute of Technology. , 1998 [13] R. W. Fox, S. J. Kline, “ Flow Regime Data and Design Methods for Curved Subsonic Diffusers,” Journal of Basic Engineering, Vol.84, pp. 303-312, 1962. [14] S. D. Gillmor, B. J. Larson, J. M. Braun, C. E. Mason, L. E. Cruz-Barba, F. Denes, and M. G. Lagally, “Low-Contact-Angle Polydimethyl Siloxane (PDMS) Membranes for Fabricating Micro-Bioarrays,” 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, pp.51-56, 2004. [15] J. M. Berg, R. Anderson and B. Lahlouh, “A two-stage discrete peristaltic micropump,” Sensors and Actuator A: Physical, Vol.104, pp. 6-10, 2003. [16] M. A. Unger, T. Thorsen and S. R. Quake, “Monolithic microfabricated valves and pumps by multilayer soft lithography,” Science, Vol.288, pp. 113-116, 2000. [17] S. W. Park, S. S. Yang and J. J. Park, “Fabrication of a peristaltic PDMS micropump,” Sensors and Actuators A: Physical, Vol.123-124, pp. 453-458, 2005 [18]沈志忠、 裘常新, “新式微蠕動幫浦之設計製作及操控”,中國機械工程學會第二十二屆全國學術研討會論文集,國立台灣海洋大學機械與機電工程學系,中壢、台灣,第 149-153 頁,2005. [19]康淵、陳信吉, “ ANSYS入門”,全華,臺北市, 2006. [20]康淵、翁嘉駿、何熹羽、馮威強, “ ANSYS進階”,全華,臺北市, 2006.
摘要: 本論文在於表述一個製作蠕動式微泵浦的方法,首先以微機電技術之黃光微影製程,運用PDMS翻模技術與PDMS結合技術製作微流道與致動腔體,接著設計一組可攜式驅動控制器,以循序控制的方式控制三組壓電致動片驅動致動腔體使薄膜變形,最後整合為可攜無閥蠕動式微泵浦系統。研究中採行「多層塗佈方式」塗佈JSR-THB負光阻,首先製作具有微流道與致動腔體的JSR母模,再利用PDMS翻模技術製作微流道與致動腔體,減少黃光微影製程的製作時間與成本,最後在玻璃上塗佈PDMS,將翻模完成之微流道與致動腔體置於玻璃上於100℃下接合。實驗結果在直流電壓24V,頻率50Hz循序控制下,體積流率可達約365µl/min之流量驅動。
This thesis is to describe a method for fabricating a peristaltic micro-pump. First, photolithography process is used in MEMS technology to fabricate a micro-pump mold. PDMS molding and PDMS bonding method are used to fabricate a micro-channel and an actuator chamber. Second, a portable drive controller is designed to control three PZT actuators in proper sequence to drive the chamber membrane. After that, all parts are integrated into a portable valve-less peristaltic micropump system. In this thesis, the JSR mold including a micro-channel and an actuator chamber is fabricated by the multi-layer coating technology. By using PDMS molding technology to fabricate a micro-channel and an actuator chamber, it can reduce process time and cost. Then, the PDMS mold was bonded on the PDMS coated glass at temperature 100℃. The maximum flow rate of the micropump is about 365µl/min at 50 Hz, when the voltage is 24V.
URI: http://hdl.handle.net/11455/4062
其他識別: U0005-0702200709463500
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-0702200709463500
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