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標題: 液體注入式微型可變焦透鏡模組研製
Fabrication of miniaturized variable-focus lens modules using liquid filling technique
作者: 楊中堯
Yang, Chung-Yao
關鍵字: Variable-focus lens
PDMS Bonding
PZT actuator
出版社: 精密工程學系所
引用: 1.行政院國家科學委員會,微機電系統技術與應用,民國92年7月。 2.Choi, Y., Park, J. H., Kim, J. H. and Lee ,S. D., “Fabrication of a focal length variable microlens array based on a nematic liquid crystal,” Optical Materials, 21, pp. 643-646, 2002. 3.Ren, H., Fan, Y. H., Lin, Y. H. and Wu, S. T., “Electronically controlled liquid crystal yields tunable-focal-length lenses,” SPIE’s oemagazine, 4(9), pp. 25-27, 2004. 4.Ren, H., Fan, Y. H. and Wu, S. T., “Polymer network liquid crystals for tunable microlens arrays,” Journal of Physics D: Applied Physics, 37, pp.400-403, 2004. 5.Ren, H., Fan, Y. H., Gauza, S. and Wu, S. T., “Tunable microlens arrays using polymer network liquid crystal,” Optics Communications, 230(4-6), pp. 267-271, 2004. 6.Ren, H. Fan, Y. H., Lin, Y. H. and Wu, S. T., “Tunable-focus microlens arrays using nanosized polymer-dispersed liquid crystal droplets,” Optics Communications, 247(1-3), pp. 101-106, 2005. 7.Fan, Y. H., Ren, H., Liang, X. and Wu, S. T., “Tunable-focus liquid crystal microlens arrays for display applications,” IEEE, 1, pp. 8-9, 2004. 8.Buckley, L., Sands, R., Scribner, D. and Zuccarello, G., “Bio-inspired Optics Draw On Natural Optical Systems to Provide Enhanced Performance,” SPIE’s oemagazine, 4(9), pp. 24, 2004. 9.Kuiper, S. and Hendriks, B. H. W., “Variable-focus liquid lens for miniature cameras,” Applied Physics Letters, 85(7), pp. 1128-1130, 2004. 10.Agarwal, M., Gunasekaran, R. A., Coane, P. and Varahramyan, K., “Polymer-based variable focal length microlens system,” Journal of Micromechanics and Microengineering, 14, pp. 1665-1673, 2004. 11.Chen, J., Wang, W., Fang, J.and Varahramyan, K., “Variable-focusing microlens with microfluidic chip,” Journal of Micromechanics and Microengineering, 14, pp. 675-680, 2004. 12.Jeong, K. H., Liu, G. L., Chronis, N. and Lee, L. P., “Tunable microdoublet lens array,” Optics Express, 12(11), pp. 2494-2500, 2004. 13.Chronis, N., Liu, G. L., Jeong, K. H. and Lee, L. P., “Tunable liquid-filled microlens array integrated with microfluidic network,” Optics Express, 11(19), pp. 2370-2378, 2003. 14.Hecht, E., Optics, Addison Wesley, CA: University Adelphi, pp.262- 268, 2002. 15.Gillmor, S. D., Larson, B. J., Braun, J. M., Mason, C. E., Cruz-Barba, L. E., Denes, F. and Lagally, M. G. “Low-Contact-Angle Polydimethyl Siloxane (PDMS) Membranes for Fabricating Micro-Bioarrays,” 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, pp. 51-56, 2004.
摘要: 本論文在於表述一個簡易之方法製作可變焦透鏡,包含一可撓式變焦透鏡腔體及驅動機構,以便可運用於個人端可攜式數位影像系統中。實驗以直徑2mm之透鏡來做探討,其所能變焦之範圍大約在20.33mm至9.36mm之間,依據腔體內所充滿之液體而有所不同。主要步驟為利用微影製程製作出光阻結構,接著利用可撓式PDMS材料作翻模,而翻模後的結構就形成流道及儲存液體之腔體,接著再製作一片PDMS之塊狀底材,再將兩片固化之PDMS結構互相接合,利用液態PDMS及高溫烘烤以達到接合目的。待黏結密封之後裁切適當的部分來作為變焦透鏡之主體,再利用壓電致動片驅動腔體薄膜,藉由腔體內的壓力變化來改變PDMS薄膜的變形程度,以達到所要求的焦距變化,以此驅動方式來真正落實模組化的要求,而本研究之重點在與以往利用外接之驅動方式不同,利用壓電片來做為驅動機構,不僅省空間,也可方便未來電路之設計,使其整合於系統上,且只接合一次,可有效減少不必要之接合縫隙所造成的液體外漏,也不需要氧電漿接合或蝕刻製程,能有效降低成本,達到量產所需。
This thesis is to describe a simple method for fabricating variable-focus lens including a flexible lens chamber and a driving mechanism. A variable-focus lens with 2mm in diameter and focus turning range from 20.33mm to 9.36mm based on different liquids in the chamber was carried out from this investigation. Main fabrication steps are described below. First, the patterened microstructure was used as a mold using photolithography process and then using PDMS to cast over the mold. The cured PDMS was peeled off from the mold and becomes the microchannel and circular chamber. Second, a piece of PDMS was used as the substrate. And then making the two PDMS structures to bond together using PDMS solution in the oven was proceeded. After that, trim the proper section as the principal part for this variable-focus lens. Finally using a piezoelectric actuator to drive the chamber membrane can control the flow rate precisely. To change the deformation of PDMS film by varying the microfluidic volume can achieve the desired variable focal length. The characteristics of this method are completely using PDMS as final structure. Only bonding once that can effectively reduce leakage caused by unnecessary bonding crack. No oxygen plasma treatment or etching process were used, it can reduce the instrument cost.
其他識別: U0005-1207200616331800
Appears in Collections:精密工程研究所



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