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標題: 建構一新穎之微拉伸試驗機制以量測次微米尺度薄膜材料之機械行為
Design and develop a novel microtensile apparatus to measure the mechanical properties of thin films
作者: 江忠勳
Jiang, Jung-Shiun
關鍵字: Piezoactuator
LVDT Load cell
出版社: 精密工程學系所
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摘要: 摘要 在此篇論文中針對目前文獻當中,對於以往微拉伸試驗上負載對準的問題加以改進,並建構一新穎之微拉伸機制以量測薄膜材料之機械行為,其獨特的感應樑柱設計使得材料受力與伸長量可藉由感測器直接測得,同時設計一新式電鍍製程製作微拉伸試件,提升試件製作的速率與良率,並利用此微拉伸試驗機測得銅與金薄膜材料的楊氏係數與降伏強度。
In this research, we present a novel designed microtensile testing apparatus that is capable of measuring the mechanical properties of free-standing thin film materials. Its unique sensor beam design causes stress and stain of the materials to be obtained directly and accurately. We also develop a new fabrication method by using the electroplating method to increase the sample fabricate success rate and yield. In addition, we also eliminate the loading misalignment problem of the previous microtensile testing. We have found the mechanical properties (Young s modulus, yield stress) of copper and gold thin films by using this system.
其他識別: U0005-1508200610222300
Appears in Collections:精密工程研究所



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