Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4160
標題: 以浸入式曝光具有傾斜反射面之高分子脊樑式波導結構研製
Using immersion lithography for fabricating an inclined reflective face of ridged waveguides in polymer
作者: 吳仲泂
Wu, Chung-Chiung
關鍵字: optical waveguides
光波導
polymer waveguides
light-communication
reflection mirror
波導管
光通訊
反射鏡
出版社: 精密工程學系所
引用: [1] Michel A. Rosa, Nam Q. Ngo, Denis Sweatman, Sima Dimitrijew, and H. Barry Harrison, “Self-alignment of optical fibers with optical quality end-polish silicon rib waveguides using wet chemical micromachining techniques”, IEEE J. Selected Topics in Quantum Electronics, vol. 5, no. 5, pp. 1249-1254, 1999. [2] Peter A. Andrekson, and Arne Alping, “Optoelectronic properties of semiconductors lasers butt-coupled to optical fibers”, IEEE J. Quantum Electronics, vol. 24, no. 10, pp. 2039-2044, 1988. [3] Toshihiko Baba, and Yasuo kokubun, “High efficiency light coupling from antiresonant reflecting optical waveguide to integrated photodetector using an antrireflecting layer”, Applied Optics, vol. 29,no.18, pp. 2781-2791, 1990. [4] 李沛宸, 1×2 Y-branch之大角度偏折波導分光器, 國立中山大學光電工程所碩士論文, 2002. [5] 1999年光電工業綜論, 工研院光電所, 1999. [6] Takashi Satoh, Akira Ichimura, Osamu Mikami, Satoru Tomaru, Makoto Hikita, and Teiji Uchida, “Coupling of spot-size converted laser diode to polymeric waveguide with 45-degree micro reflection mirror for optical surface mount technology,” IEMT/IMC Proceedings, pp. 114-117, 1998. [7] Jianhua Gan, Linghui Wu, Hongfa Luan, Bipin Bihari, and Ray T. Chen, Two-dimensional 45 surface-normal microcoupler array for guide-wave optical clock distribution,” IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 11, no.11, pp. 1452-1454, 1999. [8] Jurgen Van Erps, Bart Volckaerts, Pedro Vynck, Christof Debaes, and Hugo Thienpont, “Fabrication of multimode polymer waveguides with integrated micro-mirrors using Deep Lithography with Protons,” Proceedings Symposium IEEE/LEOS Benelux Chapter, pp. 87-90, 2004. [9] Jurgen Van Erps, Lawrence Bogaert, Bart Volckaerts, and Hugo Thienpont, “Deep Lithography with Protons for the fabrication of optical waveguides with integrated out-of-plane coupling structures,” Proceedings Symposium IEEE/LEOS Benelux Chapter, pp. 87-90, 2005. [10] Alexei L. Glebov, Senior Member, IEEE, James Roman, Michael G. Lee, and Kishio Yokouchi, “Optical interconnect modules with fully integrated reflector mirrors,” IEEE photonics technology letters, vol. 17, no. 7, JULY 2005. [11] Ken-ichiro Tanaka, Tomoaki Matsushima, Masao Kubo, Toru Nakashiba, and Hiroyki Yagyu, “Manufacture of 45 micro mirrors for optical-electrical printed wiring boards using excimer laser,” 松下電工技報, vol. 54, no. 1, pp. 95-100, 2005. [12] H. Kogelnik and Shank C.W., “Couple wave theory of distributed Bragg reflector”, Journal of Applied Physics, vol. 4, pp. 2327-2335, 1972. [13] A. Yariv, “Coupled mode theory for guided-wave optics”, IEEE Journal of Quantum Electronics, vol. QE-9, pp. 919-933, 1973. [14] T. Erdogan, “Fiber grating spectra”, J. Lightwave Technol., vol. 15, pp. 1277-1294, 1997. [15] Lambda Research Corporation, “Trace Pro-Software for Opto-Mechanical Modeling User’s Manual Release 3.0”, 2002. [16] J. C. Manifacier, J. Gasiot, and J. P. Fillard, “A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film”, J. Phys. E: Sci. Instrum., vol. 90, pp. 1002, 1976. [17] R. Swanepoel, “Determination of the thickness and optical constants of amorphous silicon”, J. Phys. E: Sci. Instrum., vol. 16, pp. 1214, 1983. [18] H. Nishihara, M. Haruna, and T. Suhara, “Optical integrated circuits”, McGraw-Hill Book Company, 1989. [19] 楊政霖, 高分子光波導與光柵的製作與研究, 國立交通大學光電工程所碩士論文, 2002. [20] 黃淳權, 微機電概論, 高立圖書有限公司, 2000. [21] 莊達人, VLSI 製造技術, 高立圖書有限公司, 2001.
摘要: 本論文研究探討利用弗列斯涅(Fresnel Refraction)折射原理進行設計與製作出具備傾斜反射面的高分子波導結構,並量測波導之光傳遞效率。選擇具有成長200μm厚度的二氧化矽之矽晶片作為實驗所需之基板,因為二氧化矽對光具有低本質吸收及低散射性等特質,故可作為所設計之抗反射層;所使用的光阻為JSR THB-120N來作為製作高分子波導的材料,它具有可調折射率、良好的導光性以及良好的熱穩定性等。配合精確的數學計算,得以UV曝射光能夠以45 入射,進而產生45 反射斜邊,並配合二次曝光效果,完成所設計之45 高分子脊梁式波導結構。
This thesis aims to develop an inclined reflective face of polymer waveguides by using Fresnel Refraction principle and measure the efficiency of light-transmitted in polymer waveguides.We using the Si substrate has 200μm thickness SiO because of its low absorbing and scattering, so it could be the anti-reflection layer;it also has well-variable refractive index、well-transmittal and well-heated stability of JSR THB-120N negative photoresist which we choice to be materials to develop the polymer waveguides. By dint of accurately mathematics calculation according to Fresnel Refraction, we could change the exposing angle and make it to fabricate 45 degree ridged polymer waveguides.
URI: http://hdl.handle.net/11455/4160
其他識別: U0005-2806200710213400
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2806200710213400
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