Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4186
標題: 阻氣層鍍膜結構之開發與應用
Development and Application of Gas Barrier Coatings
作者: 黃渭豪
Huang, Wei-Hao
關鍵字: Flexible
可撓式
Barrier
WVTR/OTR
Thin-Film Lithium Batteries
PECVD
阻障層
水/氧氣透過率
薄膜鋰電池
電漿輔助化學氣相沉積
出版社: 精密工程學系所
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摘要: 薄型化可撓式鋰電池具有體積薄、質量輕及可應用於軟性電子產品等優點,被認定是鋰二次電池的發展趨勢。由於鋰電池的電極與電解質對水/氧氣相當敏感,尤其是電解質極易與水發生反應,故鋰電池封裝的阻水阻氧能力特別受到重視。 本研究以電漿輔助化學氣相沉積法,鍍製無機薄膜氮化矽、氧化矽於聚碳酸酯基板,分別探討不同製程參數對該兩種薄膜特性的影響。接著製作一至四對由氮化矽、氧化矽堆疊的多層氣體阻隔膜,利用鍍鈣測試法量測多層鍍膜水氣透過率。為了進一步提升氮化矽/氧化矽堆疊結構的抗可撓性,通過調整射頻功率,和導入壓克力聚合物薄膜 (聚-對二甲苯) 做為無機多層結構的緩衝層,以降低薄膜內應力,經過多重製程參數最佳化,本實驗設計之含聚-對二甲苯緩衝層之多層膜,一方面可以改善無機膜堆疊結構抗可撓不佳之問題,並降低表面粗糙度,另一方面相較市面上氮化矽/聚-對二甲苯交互堆疊技術,可大幅降低製程時間。經實驗結果顯示,本結構在經過撓曲測試1000次後,水氣透過率仍可低於9.11×10-5 g/(m2.day)。
Because of light weight and easy portability, highly-efficient flexible thin-film lithium ion secondary batteries will generate many potential applications including RFID, smart cards, and sensors, etc. However, the positive electrodes, the electrolyte and the negative electrodes in these batteries are readily susceptible to the moisture and oxygen which not only reduce the lifetime but pose safety problems. Therefore, how to limit the permeation of oxygen and water vapor into the battery to such a small level by a suitable multilayer barrier package is becoming an important issue. In this work, various samples or barrier materials, such as respective silicon nitrides (SiNx), silicon oxides (SiOx) and pairs of SiNx and SiOx, are prepared using plasma-enhanced chemical vapor deposition (PECVD) technology. At the beginning, extensive parameters studies of the dependence on respective SiNx and SiOx growth are considered to be done to develop an optimal condition or recipe for the barrier growth. After obtaining suitable parameters, various pairs of multilayer stacks containing SiNx and SiOx are prepared to investigate the transmission rates of water vapor and oxygen using a calcium (Ca) coating test. Finally, with the aid of optimized PECVD growth conditions and reasonable stacking in a parylene reactor, we report the optimal barrier material structures (SiNx + two SiOx/SiNx stacks + parylene + SiNx + one SiOx/SiNx stack) in which the parylene is used as the insertion layer to smooth and strengthen the interfaces or surfaces of layers. After 1000 times bending test, the water vapor transmission rate (WVTR) can still stay below 9.11 X 10-5 g/(m2.day) under such a measurement environment (10 days at 25 oC, 50% in relative humidity).
URI: http://hdl.handle.net/11455/4186
其他識別: U0005-2101200912524000
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2101200912524000
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