Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4207
標題: 一個磁力致動的鈷鎳雙穩態機構的設計製造與特性分析
Design, fabrication and characterization of a magnetically actuated Co-Ni bistable micromechanism
作者: 邱延賜
Chiu, Yen-Si
關鍵字: MEMS
微機電系統
electrodeposition
sacrificial layer
compliant bistable mechanism
magnetic force
電沉積
犧牲層
撓性雙穩態機構
磁力致動
出版社: 精密工程學系所
引用: 國科會精密儀器發展中心,2003,微機電系統技術與應用,初版,精密儀器發展中心出版,新竹市。 陳建人,民國92年,微機電系統技術與應用,行政院國家科學委員會精密儀器發展中心出版。 王大倫 譯,民國86年,實用電鍍學,財團法人徐氏基金會。 Edward M. Purcell, 1992, Electricity and Magnetism, McGraw-Hill Allen Bai, Chi-Chang Hu, "Effects of electroplating variables on the composition and morphology of nickel-cobalt deposits plated through means of cyclic voltammetry," Electrochimica Acta , 47 (2002) , 3447-3456 Akiyama, T., Collard, D., and Fujita, H., (1997), “Scratch Drive Actuator with Mechanical Links for Self-assembly of Three Dimensional MEMS,” Journal of Microelectromechanical Systems, Vol. 6, pp. 10-17. Smits, J.G., (1992), “Design Consideration of a Piezoelectric-on-Silicon Microrobot,” Sensors and Actuators, Vol. 35, No. 2, pp. 129-135. Ballandras, S., Daniau, W., Basrour, S., and Robert, L., (1995), “Deep Etch X-ray Lithography Using Silicon-gold Masks Fabricated by Deep Etch UV Lithography and Electroforming,” Journal Micromechanics and Microengineering, Vol, 5, pp. 203-208. 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摘要: A compliant bistable mechanism is investigated in this research. It is actuated by the Lorenz force. The design parameters are displacement, bistability, and the Lorenz force. With current applied to the bistable mechanism, the displacement and the reaction force of the compliant bistable mechanism are investigated. UV-LIGA process are used for fabrication of the prototypes. We use photolithography and electrodeposition to fabricate CoNi compliant bistable microstructures on glass substrates. On the fabrication aspect, taking advantage of good adhesion and selectively etching properties between Cu and CoNi, we use Cu as the sacrificial layer to fabricate the CoNi compliant bistable mechanism. A versatile vibrometer for characterizing in-plane motion of microelectromechanical system (MEMS) is developed. It combines conventional optical components and a He-Ne Laser with incremental phase shifts. The system drives a digital charge-coupled device camera to record a video sequence of the moving structures frozen by the laser at twelve equally spaced phases. The periodic motion of the prototypes is estimated by computing the values of displacements between successive images. The natural frequencies of the prototypes are determined. The experimental results are in good agreement with those based on a MEMS Motion AnalyzerTM (MMA G2, Umech Technologies, USA).
URI: http://hdl.handle.net/11455/4207
其他識別: U0005-0602201000180100
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-0602201000180100
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