Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4241
標題: 電鑄網版轉印微透鏡陣列之研究
Research of Screen Printing Microlens Array by Electroforming Molds
作者: 林明哲
Lin, Ming-Je
關鍵字: 網印技術
micro-electroforming
微透鏡陣列微光學
screen-printing technology
micro-lens arrays
micro-optics
出版社: 精密工程學系所
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摘要: 本研究目的為以網版印刷技術製作微透鏡陣列,網版印刷模仁使用LIGA-like技術製作並進行網版印刷製程之設計與整合,完成微透鏡陣列之製作。在實驗中溫度的控制是光阻形成微透鏡的重要因素並且可以減少光阻在網版網目間溢流之現象。本研究只需在前期使用LIGA-like技術,開發網版印刷模具,其後可以重複利用電鑄金屬網模仁進行網印微透鏡陣列,最後實驗成功製作直徑30μm之微透鏡陣列,本實驗具有創新與獨特之做法且本實驗為微透鏡之簡易製程,具有成型快速,易於熱熔,可降低成本,對未來相關的製程技術與產業有很大的幫助。
The purpose of this research is to present the fabrication of microlens array by using screen-printing. The printing mold was prepared by LIGA-like technology, lithography process is used to pattern the mold insert. Then this printing mold is electroformed by nickel sulfamate bath. The temperature played an important role in printing and thermal reflow process, that it can control the photoresist viscosity and the radius curvature of microlens. This study uses LIGA-like technologies at the early stage to prepare the screen-printing mold. The mold can be repeatedly use in the fabrication of microlens array. Microlens with diameter of 30 μm are successfully fabricated with this technique. This is an innovative and unique method. The experiment is successful to make the Microlens array in a simple manufacturing process with fast formation, cost reduction and controllable microstructure appearance advantages. The technique is expected to benefit further relation technology for industry.
URI: http://hdl.handle.net/11455/4241
其他識別: U0005-0107201013372000
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-0107201013372000
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