Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4254
標題: 非對稱微透鏡陣列設計製作研究
Research of design and fabrication on asymmetric microlens array
作者: 林盈妃
Lin, Ying-Fei
關鍵字: photolithography
熱熔法
thermal reflow process
microlens array
asymmetrical microlens
tilt angle
微透鏡陣列非對稱透鏡
傾斜角
出版社: 精密工程學系所
引用: [1] S. T. Wu and D. K. Yang, “Overview of reflective displays,” in Reflective Liquid Crystal Displays (Wiley, Chichester, UK), pp. 1–31, 2001. [2] I. Fukuda, E. Sakai, Y. Kotani, M. Kitamura, and T. Uchida, “A new achromatic reflective STN-LCD with one polarizer and one retardation film,” J. Soc. Inf. Disp. 3, 83–87, 1995. [3] H. J. Cornelissen, J. H. M. Neijzen, F. A. M. A. Paulissen, and J. M. Schlangen, “Reflective direct-view LCDs using polymer dispersed liquid crystal (PDLC)and dielectric reflectors,” in Proceedings of the Seventeenth International Display Research Conference (Society for Information Display, San Jose, Calif.), pp. 144–147, 1997. [4] D. K. Yang, L. C. Chien, and J. W. Doane, “Cholesterol liquid crystal polymer–gel dispersions: reflective display applications,” in Proceedings of the Society for Information Display (Society for Information Display, San Jose, Calif.), pp. 759–761, 1992. [5] Z. J. Lu, J. L. West, X. Y. Huang, D. K. Yang, and J. W. Doane, “Surface-modified reflective cholesterol displays,” in Proceedings of the Society for Information Display (Society for Information Display, San Jose, Calif.), pp. 172–175, 1995. [6] T. H. Lin, H. Yang and C. K. Chao, “Concave microlens array mold fabrication in photoresist using UV proximity printing,” Microsystem Technologies, 13, pp. 1537-1543, 2007. [7] S. Y. Hung, C. P. Lin, H. Yang, and Y. P. Chang "Optimal design using thermal reflow and caulking for fabrication of gapless microlens array mold inserts," Optical Engineering, 46(4), 043402-1~8, 2007. [8] T. H. Lin, S. Y. Hung, H. Yang and C. K. Chao, “Fabrication of a microlens array electroformed mold with low roughness and high hardness,” Journal of Micromechanics and Microengineering, 17, 419-425, 2007. [9] H. Yang, R. F. Shyu, J. W. Huang, “New production method of convex microlens arrays for integrated fluorescence microfluidic detection systems,” Microsystem Technologies, vol. 12, pp. 907-912, 2006. [10] J. Gan, L. Wu, H. Luan, B. Bihari, and R. T. Chen, “Two-dimensional 45surface-normal microcoupler array for guide-wave optical clock distribution,” IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 11, no.11, pp. 1452-1454, 1999. o [11] I. Mikulskas, “Fabrication of photonic structures by means of interference lithography and reactive ion etching,” Applied Surface Science, Vol. 186, pp. 599-603, 2002. [12] F. Ko, J. Chen, F. Chang, “Fabricating and characterizing oblique polymer structures by electron beam writing on resist-coated SiO2 wafers," Microelectronic Engineering, Vol. 83, pp. 1132-1137, 2006. [13] 吳昭雄,“浸入式傾斜曝光製作複合光學微結構之研究”, 碩士論文,2007. [14] C. C. A. Chen, C. M. Chen, J. R. Chen, “Tool path generation for diamond shaping of aspheric lens array,” Journal of Materials Processing Technology, vol. 192-193, pp. 194-199, 2007. [15] S. S. Hsu, H. Yang, “High Fill-factor Microlens Array Fabrication Using Proximity Printing with the Microlens Array Mask,” International Symposium on Robotics and Intelligent Sensors, March, 2010. [16] J. J. Yang, “The Study of LIGA Like Fabrication Process for Refractive/Diffractive Microlens”, 畢業論文, 2007. [17] F. J. Ko and H. P. D. Shieh, “Brightness and contrast enhancement of reflective liquid crystal displays by microlens array light control film,” Jpn. J. Appl. Phys.39, p-p. 2647–2650, 2000. [18] A. Schilling, R. Merz, C. Ossmann and H. P. Herzing, “Surface Profiles of Reflow Microlenses under the Influence of Surface Tension and Gravity”, Optical Engineering, Vol. 39, No. 8, pp. 2171-2176, 2000. [19] 何志堅,光的故事,第7~13頁,中華民國中山學術文化基金會中山文庫,民國八十七年 [20] Eugene Hecht, Optics Fourth Edition, Addison Wesley, pp.95-100, 2002. [21] Activities of Exhibition and Education in Astronomy,AEEA 天文教育資訊網,http://aeea.nmns.edu.tw/index1.html [22] 薩本棟,普通物理學,第876~882頁,中華教育文化基金董事會編輯委員會,台灣商務印書館,民國四十九年 [23] 李冠卿,近代光學,第18-20頁,聯經出版事業公司,民國七十七年 [24] 耿繼業,何建娃,幾何光學,全華科技圖書股份有限公司,民國九十三年 [25] B. Shapiro, H. Moon, R. L. Garrell and C. J. Kim, “ Equilibrium Behavior of Sessile Drops under Surface Tension, Applied External Fields, and Material Variations”, Journal of Applied Physics, Vol. 93, No.9, pp. 5794-5811, 2003. [26] 陶雨台,表面物理化學,千華出版公司,1988 [27] 許泳順,“表面張力及重力對光阻熱熔成型形貌影響之探討” ,畢業論文,民國九十五年 [28] 莊達人,VLSI製造技術,高立圖書有限公司,2000。
摘要: 本研究的目標為開發具有特定傾斜角度之新式非對稱微型透鏡陣列,由黃光微影技術製作出具有非對稱微透鏡形貌之光阻結構,接著再鍍上金屬薄膜之後進行觀察量測。在實驗進行中,利用光線的行進原理,搭配不同的曝光角度,之後再配合不同的熱熔傾斜角度,經過歸納整理可簡單地控制與決定非對稱微透鏡之傾斜角度。本實驗之第一個部份,主要控制因子為透鏡之直徑尺寸大小,分別為200μm、400μm以及600μm;第二個部份,主要是基板擺放之傾斜曝光角度分別為30°、45°、60°;第三個部份,主要是熱熔時,因透鏡本身直徑不同,傾斜倒置熱熔時所受之重力影響亦不相同,所擺放角度為45°及90°。本製程最大的優點在於利用此製程,可以將單ㄧ簡單的光罩,透過本製程中的各種不同的參數配合與改變,已成功地製作出傾斜角度為20°~50°之非對稱微透鏡陣列。使用相對於其他方法之低成本製程,且此方法是可以達到量產實現化的設計與技術。
This study aims at the development of novel asymmetric microlens array with certain inclined angles. The asymmetric microlens array profiles was defined by the photolithography process and observed by a confocal microscope with sputter a thin metal film. In the experiments, using the light path and different exposure and thermal reflow angles can control and determine asymmetric microlenses with certain inclined angles easily. The first part of this experiment, the dominant controlling factor was the lens diameters which were 200μm, 400μm and 600μm respectively. The second part was the tilt angles of substrate in exposure at 30 °, 45 °and 60 °. The third part was to study the gravity effect in thermal reflow at the laying angles 45 ° and 90 ° related to different lens diameters. The greatest advantage of the process was one single mask can fabricate different asymmetric microlens array by using different parameters. In this thesis, the asymmetrical microlens array with inclined angles between 20゚and 50゚ have been produced successfully. Compared with other methods, this method is more cost competitive and can be realized the design and production technology.
URI: http://hdl.handle.net/11455/4254
其他識別: U0005-1506201017285900
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-1506201017285900
Appears in Collections:精密工程研究所

文件中的檔案:

取得全文請前往華藝線上圖書館



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.