Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4286
標題: 以微拉力試驗機測試 應力條件對銅-錫介金屬薄膜生成之影響
Temperature Dependent Micromechanical Testing on the Formation of Cu/Sn Intermetallic Thin Films
作者: 呂芳慶
Lu, Fang-Ching
關鍵字: 銅-錫介金屬化合物
Copper-tin intermetallic formation
銲料擴散
微機械測試
solder diffusion
micromechanical test
出版社: 精密工程學系所
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摘要: 本研究以微拉力試驗機測試應力條件對銅-錫介金屬薄膜生成之影響,由電腦對微拉力試驗機進行應力施加及回授控制,讓試件可以穩定的受到所需應力條件之大小,探討施加外應力對於界面反應介金屬化合物的生成之影響。 本研究在不同外加應力下(拉伸應力、壓縮應力、不受力),不同應力大小(25 MPa、50 MPa、100 MPa),不同熱處理時間(1天、3天、5天),分別探討銅-錫介金屬化合物(IMC)的生成厚度與微結構觀察,並與文獻進行討論與比較,探討應力釋放對IMC生成的影響。
A temperature controlled tensile testing was performed to investigate the influence of external stress on the growth of an interfacial Cu-Sn IMC layer. The test specimens were prepared by depositing 25 μm layers of tin atop of copper substrate using electroplating. Samples were then clamped in a micromechanical testing apparatus integrated with a furnace. Experiments were carried out using load feedback control to provide constant load on the specimens with the stress level of 25 MPa, 50 MPa and 100 MPa under constant temperature at 200C for 1 to 5 days annealing. Comparisons were made between samples undergoing stresses and those without stresses annealing. We observed the influence of stress levels and aging time on the formation of intermetallic compounds (IMC). Stress does influence the formation of Cu/Sn IMC. The thickness of IMC increased under stress. The growth rate of IMC was faster in stressed tin samples. Moreover, the formation of IMC micrographic structures under external stress differs considerably according to the level of stress.
URI: http://hdl.handle.net/11455/4286
其他識別: U0005-0908201318441600
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-0908201318441600
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