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Research of Shaped-Controlled Microlens Array by Diffuser Lithography Process
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This thesis is to study the shape-controlled microlenses fabricated by diffuser lithography. Two parts are included. First part is to produce different shapes and functions of microlens by diffuser lithography. Second part is to explore the relationship between the diameter, pitch of the circular masks and the shape, sag of microlenses. In the first part, the research is firstly to simulate the light-intensity distribution on the photoresists surface after the lights passed through the diffuser and the masks using the optical simulation software TracePro. The experiments were to proceed the implementation of diffuser lithography to successfully produce the circle-shaped and crater-shaped micro-structure based on the simulation result. Second part, the research is to explore the relationship between the diameter, pitch of the circular masks and the shape, sag of microlenses. It is found out that high sag microlens and its array can be successfully produced when the diameter of the circle is 25μm, and the pitch of the circle is 20μm.
|Appears in Collections:||精密工程研究所|
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