Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/43263
標題: The characteristics of reactively sputtered AgOx films prepared at different oxygen flow ratios and its effect on super-resolution near-field properties
作者: Her, Y.C.
何永鈞
Lan, Y.C.
Hsu, W.C.
Tsai, S.Y.
關鍵字: silver oxide
super-RENS disk
chemical decomposition
irreversibility
structural phase transition
readout
期刊/報告no:: Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers, Volume 43, Issue 1, Page(s) 267-272.
摘要: The characteristics of several reactively sputtered AgOx films, prepared at different oxygen flow ratios, with and without ZnS-SiO2 protective layers have been examined. For the as-deposited AgOx films, the amount and size of Ag clusters decreased, and the constituent phase of AgOx gradually transferred from pure Ag2O, to a mixture of Ag2O and AgO, then to pure AgO, as the oxygen flow ratio was increased. After annealing, the reduction of AgO into Ag2O and decomposition of Ag2O into Ag and O-2 took place, and the decomposed Ag elements would diffuse outward and precipitate small silver particles on the surface of ZnS-SiO2 protective layers. The chemical decomposition of AgOx film confined by ZnS-SiO2 protective layers was confirmed to be an irreversible process. The super-resolution near field effect becomes significant only when the superresolution near-field structure (super-RENS) disk with an AgOx mask layer prepared at oxygen flow ratios above a threshold value, where AgOx film consists of Ag2O or AgO phase.
URI: http://hdl.handle.net/11455/43263
ISSN: 0021-4922
文章連結: http://dx.doi.org/10.1143/jjap.43.267
Appears in Collections:材料科學與工程學系

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