請用此 Handle URI 來引用此文件: http://hdl.handle.net/11455/43617
標題: Low-temperature curing of aluminum-doped zinc oxide films assisted by ultraviolet exposure
作者: Chang, S.Y.
張守一
Huang, Y.C.
Chu, H.H.
Hsiao, Y.C.
Yang, N.H.
Lin, C.F.
關鍵字: thin films
sol gel
crystallization
photo-cvd sio2
thin-films
zno films
期刊/報告no:: Scripta Materialia, Volume 59, Issue 6, Page(s) 646-648.
摘要: In this study, aluminum-doped zinc oxide films were prepared by a sol-gel method, followed by thermal curing at 200-500 degrees C. Prior ultraviolet exposure resulted in the subsequent curing temperature required to produce films with obvious crystallinity being successfully lowered to 200 degrees C because of the early dissociation of diethanolamine ligands in the gel precursor. The crystalline films were constructed of nanosized grains without a preferred orientation. The grain size increased from 9 to 19 nm with curing temperature. (C) 2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
URI: http://hdl.handle.net/11455/43617
ISSN: 1359-6462
文章連結: http://dx.doi.org/10.1016/j.scriptamat.2008.05.034
顯示於類別:材料科學與工程學系

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