Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/43724
標題: The annealing effect on the improvement of hermetically carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method with methane and argon as precursor gases
作者: Lin, H.C.
薛顯宗
Shiue, S.T.
Chou, Y.M.
關鍵字: chemical vapor deposition
optical fiber
thermal annealing
thin films
diamond-like carbon
induced stress voids
h thin-films
amorphous-carbon
thermal-stresses
coating thickness
raman-scattering
graphite
strength
spectrum
期刊/報告no:: Journal of the Chinese Institute of Engineers, Volume 31, Issue 2, Page(s) 253-259.
摘要: The annealing effect on the improvement of hermetically carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method with methane and argon as precursor gases is studied. The annealing temperatures were selected as 100, 200, 300, 400, and 500 degrees C. The film thickness of carbon films decreases with increasing annealing temperature. The analytic results of Raman, FTIR, and optical band gap show that the structure models of carbon coatings after annealing can be divided into three groups. When the annealing temperature is below 300 degrees C, the unbonded hydrogen atoms in the carbon film recombine with unsaturated carbon bonds, and carbon coatings with a cross-linking structure are observed. Alternatively, when the annealing temperature exceeds 300 degrees C, the desorption of hydrogen and hydrocarbon from the edges of the sp(2) clusters becomes conspicuous. Furthermore, when the annealing temperature rises to 500 degrees C, the thermal annealing promotes the sp(2) clusters to combine and grow rapidly. Thus, a structural modification occurs in carbon films at this annealing temperature. The carbon films annealed at the temperature of 300 degrees C have excellent ability to sustain thermal loading, so it is the best for production of carbon-coated optical fibers.
URI: http://hdl.handle.net/11455/43724
ISSN: 0253-3839
文章連結: http://dx.doi.org/10.1080/02533839.2008.9671378
Appears in Collections:材料科學與工程學系

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