Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/43736
標題: Effects of annealing on the properties of hermetically carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method
作者: Chen, S.S.
薛顯宗
Shiue, S.T.
Tang, W.C.
Lin, H.Y.
關鍵字: carbon films
plasma enhanced chemical vapor deposition
optical fiber
annealing
c-h films
induced stress voids
amorphous-carbon
diamond-like
thermal-stability
coating thickness
substrate-temperature
mechanical
strength
microstructure
pecvd
期刊/報告no:: Optical Engineering, Volume 46, Issue 3.
摘要: The effects of annealing on the properties of hermetically carbon-coated optical fibers are investigated. The hermetically carbon-coated optical fibers are prepared by the plasma enhanced chemical vapor deposition method using methane and hydrogen as the precursor gases. The annealing temperatures are selected at 100, 200, 300, 400, and 500 degrees C, respectively. The thickness, optical band gap, and microstructure of carbon films are measured. Meanwhile, the water-repellency and low-temperature surface morphology of carbon-coated optical fibers are evaluated. The results indicate that the thickness and defect content of the carbon films decrease with increasing the annealing temperature, while the degree of structure order and the amount of microcrystalline graphite in the carbon films increase. When the annealing temperature is over 300 degrees C, the carbon films acquire enough thermal energy to cause a great amount of hydrogen and hydrocarbon to be released, and the carbon films transform to the graphitelike structure. Additionally, based on the evaluation of water-repellency and low temperature-induced break or delamination of carbon films, it is found that the carbon film annealed at 300 degrees C is the best one for use as the hermetic optical fiber coating. (C) 2007 Society of Photo-Optical Instrumentation Engineers.
URI: http://hdl.handle.net/11455/43736
ISSN: 0091-3286
文章連結: http://dx.doi.org/10.1117/1.2716015
Appears in Collections:材料科學與工程學系

文件中的檔案:

取得全文請前往華藝線上圖書館



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.