請用此 Handle URI 來引用此文件: http://hdl.handle.net/11455/44061
標題: Deposition and permeation properties of SiNX/parylene multilayers on polymeric substrates
作者: Chiang, C.C.
洪瑞華
Wuu, D.S.
Lin, H.B.
Chen, Y.P.
Chen, T.N.
Lin, Y.C.
Wu, C.C.
Chen, W.C.
Jaw, T.H.
Horng, R.H.
武東星
關鍵字: barrier film
polymeric substrate
cyclic bending test
crack
permeation
coatings
adhesion
layers
films
期刊/報告no:: Surface & Coatings Technology, Volume 200, Issue 20-21, Page(s) 5843-5848.
摘要: Silicon nitride (SiNX) deposited on flexible polycarbonate (PC) substrates by plasma-enhanced chemical vapor deposition have been investigated for thin-film barrier applications via the water vapor transmission rate (WVTR) and oxygen transmission rate (OTR) measurements. A cyclic bending test was used to get quantitative information about the OTR and WVTR data of the single thin brittle SiNx/PC film with various thicknesses (50-400 nm). It was found that the SiNx/PC sample with a thickness of 100 nm possessed a minimum saturated crack density, as evidenced by the lowest OTR/WVTR values after the cyclic bending test. To improve the barrier performance, a smoothing, defect-decoupling organic film (parylene) was deposited on the top of the SiNx layer. The degradation after the cyclic bending test for the parylene/SiNx/PC structure was improved more than one order of magnitude as compared with that for the SiNx/PC sample. After 3000-times cyclic bending, the WVTR and OTR of the two pairs of parylene/SiNx, coatings on PC can be maintained at a level near 0.01 g/m(2)/day and 0.1 cc/m(2)/day, respectively (below the detection limits of the MOCON systems). These indicate that the present multilayered coatings have high potential for future flexible display applications. (c) 2005 Elsevier B.V. All rights reserved.
URI: http://hdl.handle.net/11455/44061
ISSN: 0257-8972
文章連結: http://dx.doi.org/10.1016/j.surfcoat.2005.08.133
顯示於類別:材料科學與工程學系

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