Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/44985
標題: Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip
作者: Dai, C.L.
戴慶良
Lu, P.W.
Chang, C.L.
Liu, C.Y.
關鍵字: micro pressure sensors
ring oscillators
CMOS-MEMS
fabrication
substrate
mems
期刊/報告no:: Sensors, Volume 9, Issue 12, Page(s) 10158-10170.
摘要: The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode, and the top electrode is a sandwich membrane. The pressure sensor needs a post-CMOS process to release the membranes after completion of the CMOS process. The post-process uses etchants to etch the sacrificial layers, and to release the membranes. The advantages of the post-process include easy execution and low cost. Experimental results reveal that the pressure sensor has a high sensitivity of 7 Hz/Pa in the pressure range of 0-300 kPa.
URI: http://hdl.handle.net/11455/44985
ISSN: 1424-8220
文章連結: http://dx.doi.org/10.3390/s91210158
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