Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/45008
標題: A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS-MEMS technique
作者: Dai, C.L.
戴慶良
關鍵字: humidity sensors
CMOS
micro heater
ring oscillator circuit
期刊/報告no:: Sensors and Actuators B-Chemical, Volume 122, Issue 2, Page(s) 375-380.
摘要: This study presents the fabrication of a humidity sensor with a micro heater and a ring oscillator circuit using the commercial 0.35 mu m complementary metal oxide semiconductor (CMOS) process and a post-process. The micro heater is utilized to provide a super-ambient working temperature to the humidity sensor, which can avoid the humidity sensor to generate the signal drift. The humidity sensor is a capacitive type sensor. The structure of the humidity sensor consists of interdigital electrodes and a sensing film. The sensing film, which is polyimide, is coated on interdigital electrodes. The humidity sensor changes in capacitance when the sensing film absorbs or desorbs water vapor. The ring oscillator circuit is employed to convert the capacitance of the humidity sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 25.5 kHz/% RH at 80 degrees C. (c) 2006 Elsevier B.V. All rights reserved.
URI: http://hdl.handle.net/11455/45008
ISSN: 0925-4005
文章連結: http://dx.doi.org/10.1016/j.snb.2006.05.042
Appears in Collections:機械工程學系所

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