請用此 Handle URI 來引用此文件: http://hdl.handle.net/11455/46591
標題: Fabrication of Flexible Amorphous-Si Thin-Film Solar Cells on a Parylene Template Using a Direct Separation Process
作者: Lo, S.Y.
洪瑞華
Wuu, D.S.
Chang, C.H.
Wang, C.C.
Lien, S.Y.
Horng, R.H.
武東星
期刊/報告no:: Ieee Transactions on Electron Devices, Volume 58, Issue 5, Page(s) 1433-1439.
摘要: In this paper, we report on the fabrication of flexible amorphous-silicon (a-Si) thin-film solar cells on a parylene template carried by a glass plate without any adhesive. The a-Si thin-film solar cells could be separated directly from the glass carrier after a process temperature of up to 200 degrees C. The a-Si and parylene films were deposited using high-frequency plasma-enhanced chemical vapor deposition and a parylene reactor. The parylene-coated glass plate was treated with thermal annealing and Ar, N(2), or O(2) plasma. Moreover, SiN(x) and/or SiO(x) films were used as barrier layers between the transparent conductive oxide and parylene films. Details of different gas plasmas and barrier effects were investigated in terms of surface morphologies and solar cell characteristics. The a-Si thin-film solar cell on a parylene template with an open-circuit voltage of 0.74 V, a short-circuit current density of 15.69 mA/cm(2), a fill factor of 54.98%, and a conversion efficiency of 5.78 % could be obtained. After the 10-mm-radius bending test for 5000 times, the a-Si thin-film solar cells still exhibited a conversion efficiency of 4.94%. These results indicated that a-Si thin-film solar cells on parylene templates have high potential for flexible photovoltaic applications.
URI: http://hdl.handle.net/11455/46591
ISSN: 0018-9383
文章連結: http://dx.doi.org/10.1109/ted.2011.2116793
顯示於類別:精密工程研究所

文件中的檔案:
沒有與此文件相關的檔案。


在 DSpace 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。