Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/46597
標題: New production method of convex microlens arrays for integrated fluorescence microfluidic detection systems
作者: Yang, H.
黃振文
Shyu, R.F.
Huang, J.W.
楊錫杭
關鍵字: fabrication
期刊/報告no:: Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, Volume 12, Issue 10-11, Page(s) 907-912.
摘要: A new method for producing microlens array with large sag heights is proposed for integrated fluorescence microfluidic detection systems. Three steps in this production technique are included for concave microlens array formations to be integrated into microfluidic systems. First, using the photoresist SU-8 to produce hexagonal microchannel array is required. Second, UV curable glue is injected into the hexagonal microchannel array. Third, the surplus glue is rotated by a spinner at high velocity and exposed to a UV lamp to harden the glue. The micro concave lens molds are then finished and ready to produce convex microlens in poly methsiloxane (PDMS) material. This convex microlens in PDMS can be used for detecting fluorescence in microfluidic channels because a convex microlens plays the light convergence role for optical fiber detection.
URI: http://hdl.handle.net/11455/46597
ISSN: 0946-7076
文章連結: http://dx.doi.org/10.1007/s00542-006-0121-3
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