Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/46631
DC FieldValueLanguage
dc.contributor.authorShyu, R.F.en_US
dc.contributor.author楊錫杭zh_TW
dc.contributor.authorYang, H.H.en_US
dc.date2006zh_TW
dc.date.accessioned2014-06-06T08:20:29Z-
dc.date.available2014-06-06T08:20:29Z-
dc.identifier.issn0268-3768zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/46631-
dc.description.abstractMicrolens array fabrication using a vacuum suction process combed with the LIGA-like process is presented in this paper. The circular patterned array was designed on a photomask and transferred onto a substrate using photoresist patterning. Electroforming technology was used to convert the photoresist patterns into a metallic molds with an array of nozzles. Liquid JSR resist was spun onto the substrate joining the metallic mold to remove microlens array under vacuum conditions. The exposure energy and vacuum pressure were essential parameters in the microlens array manufacturing process. Microlens arrays with 50 mu m in diameter at -50 cm-Hg vacuum pressure and 100 mu m in diameter at -60 cm-Hg vacuum pressure were successfully formed. The produced microlens arrays presented smooth measured surface profiles coincident with the optical lens geometry.en_US
dc.language.isoen_USzh_TW
dc.relationInternational Journal of Advanced Manufacturing Technologyen_US
dc.relation.ispartofseriesInternational Journal of Advanced Manufacturing Technology, Volume 29, Issue 5, Page(s) 518-523.en_US
dc.relation.urihttp://dx.doi.org/10.1007/s00170-005-2549-5en_US
dc.subjectelectroformingen_US
dc.subjectmicrolens arrayen_US
dc.subjectmoldingen_US
dc.subjectvacuum suctionen_US
dc.subjectfabricationen_US
dc.titleVacuum suction aid for microlens array formation using LIGA-like processen_US
dc.typeJournal Articlezh_TW
dc.identifier.doi10.1007/s00170-005-2549-5zh_TW
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