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標題: New horizontal frustum optical waveguide fabrication using UV proximity printing
作者: Lin, T.H.
Yang, H.
Shyu, R.F.
Chao, C.K.
關鍵字: laser-diode
期刊/報告no:: Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, Volume 14, Issue 7, Page(s) 1035-1040.
摘要: This paper presents a novel method for fabricating the horizontal frustum structure as a planar optical waveguide using the proximity printing technique. A horizontal frustum optical waveguide with both lateral and vertical taper structure was produced. The orthogonal and inclined masks with the diffraction effect were employed in the lithography process. This method can precisely control each horizontal frustum optical waveguide geometric profile in the fabrication process. The horizontal frustum optical waveguide and its array with the same inclined angle were generated. The beam propagation simulation software (BPM_CAD) was used to model the optical performance. The simulation results reveal that the mode profile matched into horizontal frustum optical waveguide and fiber from the laser diode. The optical loss of the horizontal hemi-frustum optical waveguide structure was less than 0.2 dB. The horizontal hemi-frustum waveguide will be used for fiber coupling on boards for future optical communication systems.
ISSN: 0946-7076
Appears in Collections:精密工程研究所



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