Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/46765
標題: (Materials Research Society Symposium Proceedings,507:523-528)The Structural Evolution of a-Si:H Films Prepared by Pulse RF Power Modulation with Hydrogen and Helium Dilution
作者: Y. L. Jiang
M. J. Lee
S. H. Chen
關鍵字: Structural Evolution
a-Si:H Films
Pulse RF Power Modulation
Hydrogen
Helium Dilution
出版社: USA:Materials Research Society
URI: http://hdl.handle.net/11455/46765
Appears in Collections:光電工程研究所

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