Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/47998
標題: 以類神經網路為基礎之Run-To-Run製程控制器設計及其在化學機械研磨製程即時控制之應用(I)
Development of a Neural-Network Based Run-To-Run Controller with Application on the On-Line Control of CMP Processes(I)
作者: 王國禎
關鍵字: 技術發展
Process controller
自動化工程, 機械工程類
製程控制器
線上控制
化學機械研磨
類神經網路
On line control
Chemical mechanical polishing (CMP)
Neural network
URI: http://hdl.handle.net/11455/47998
其他識別: NSC90-2212-E005-023
文章連結: http://grbsearch.stpi.narl.org.tw/GRB/result.jsp?id=644771&plan_no=NSC90-2212-E005-023&plan_year=90&projkey=PB9008-0500&target=plan&highStr=*&check=0&pnchDesc=%E4%BB%A5%E9%A1%9E%E7%A5%9E%E7%B6%93%E7%B6%B2%E8%B7%AF%E7%82%BA%E5%9F%BA%E7%A4%8E%E4%B9%8BRun-To-Run%E8%A3%BD%E7%A8%8B%E6%8E%A7%E5%88%B6%E5%99%A8%E8%A8%AD%E8%A8%88%E5%8F%8A%E5%85%B6%E5%9C%A8%E5%8C%96%E5%AD%B8%E6%A9%9F%E6%A2%B0%E7%A0%94%E7%A3%A8%E8%A3%BD%E7%A8%8B%E5%8D%B3%E6%99%82%E6%8E%A7%E5%88%B6%E4%B9%8B%E6%87%89%E7%94%A8%28I%29
Appears in Collections:機械工程學系所

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