Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/48137
標題: 中頻脈衝電漿沉積含金屬類鑽碳膜之研究
On Metal-Doped Diamondlike Carbon Film Deposited by Medium Frequency Pulsed Plasma Technology
作者: 沈榮富
關鍵字: 應用研究
Magnetron sputtering
機械工程類
磁控濺射
類鑽碳膜
中頻脈衝電漿
Diamondlike carbon (DLC)
Medium frequency pulsed plasma
URI: http://hdl.handle.net/11455/48137
其他識別: NSC89-2216-E005-010
文章連結: http://grbsearch.stpi.narl.org.tw/GRB/result.jsp?id=501446&plan_no=NSC89-2216-E005-010&plan_year=89&projkey=PB8902-0303&target=plan&highStr=*&check=0&pnchDesc=%E4%B8%AD%E9%A0%BB%E8%84%88%E8%A1%9D%E9%9B%BB%E6%BC%BF%E6%B2%89%E7%A9%8D%E5%90%AB%E9%87%91%E5%B1%AC%E9%A1%9E%E9%91%BD%E7%A2%B3%E8%86%9C%E4%B9%8B%E7%A0%94%E7%A9%B6
Appears in Collections:機械工程學系所

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