Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/49044
標題: 熱處理氣氛對矽晶內氧凝聚物群所造成的影響
The Effect of Ambient on the Nucleation of Oxygen Cluster Precipitates
作者: 貢中元
關鍵字: Two-step anneal
二階段熱處理
電子電機工程類
Oxygen precipition
Point defect
氧凝聚物
間隙型缺陷
應用研究
URI: http://hdl.handle.net/11455/49044
其他識別: NSC89-2215-E005-002
文章連結: http://grbsearch.stpi.narl.org.tw/GRB/result.jsp?id=525779&plan_no=NSC89-2215-E005-002&plan_year=89&projkey=PB8905-0316&target=plan&highStr=*&check=0&pnchDesc=%E7%86%B1%E8%99%95%E7%90%86%E6%B0%A3%E6%B0%9B%E5%B0%8D%E7%9F%BD%E6%99%B6%E5%85%A7%E6%B0%A7%E5%87%9D%E8%81%9A%E7%89%A9%E7%BE%A4%E6%89%80%E9%80%A0%E6%88%90%E7%9A%84%E5%BD%B1%E9%9F%BF
Appears in Collections:電機工程學系所

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