Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/56331
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dc.contributor.author戴慶良zh_TW
dc.contributor.authorDai, Ching-Liangen_US
dc.contributor.author戴銚葦zh_TW
dc.contributor.author劉茂誠zh_TW
dc.contributor.authorDai, Yao-Weien_US
dc.contributor.authorLiu, Mao-Chenen_US
dc.contributor.other國立中興大學機械工程學系zh_TW
dc.contributor.otherNational Chung Hsing University,Department of Mechanical Engineeringen_US
dc.date2011-7-1zh_TW
dc.date.accessioned2014-06-06T09:05:49Z-
dc.date.available2014-06-06T09:05:49Z-
dc.identifier.urihttp://hdl.handle.net/11455/56331-
dc.description.abstract本發明在於提供一種整合積體電路的FET微壓力感測器,主要以CMOS製程製成一晶片體並成型於一矽基板上,其包含有一壓力感測結構及一感測電路係整合在一塊晶片體上,該壓力感測結構,係於該晶片體表面形成一壓力感測區,該壓力感測區中佈設陣列有預定數目之壓力單元,並與該感測電路間具有電性連接,藉以將該壓力感測結構之電流訊號經放大後轉換為電壓訊號輸出,藉以達到整體體積小,且利用電壓控制電阻的優點,藉以調節閘極電壓改變通道電阻,使得感測器通道電阻具有可調性,以控制壓力感測器之靈敏度者。zh_TW
dc.language.isozh_TWzh_TW
dc.title整合積體電路的FET微壓力感測器zh_TW
dc.typePatentzh_TW
dc.contributor.catalogerMiao-zhen Luoen_US
Appears in Collections:機械工程學系所
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